Academic Journal of Engineering and Technology Science, 2024, 7(3); doi: 10.25236/AJETS.2024.070313.
Yang Sun
School of Electronic Information, Xijing University, Xi'an, China
This paper introduces a piezoresistive pressure sensor, which has an important application value in the pressure measurement of hydraulic system. A novel peninsula-island-based diaphragm with grooves is designed. The proposed diaphragm can ease the contradiction between sensitivity and non-linearity compared with the conventional diaphragm structures. Especially, the elastic potential energy is concentrated above the gap position, which greatly improves the sensitivity. The optimization process for the proposed diaphragm has been presented by the finite element method (FEM). The proposed sensor chip is potentially a better choice for the high sensitive pressure sensor.
MEMS; pressure sensor; peninsula-island structure with grooves; sensitivity; non-linearity
Yang Sun. Design and Optimization of Peninsula-island-based Diaphragm with Grooves for MEMS Pressure Sensors. Academic Journal of Engineering and Technology Science (2024) Vol. 7, Issue 3: 89-95. https://doi.org/10.25236/AJETS.2024.070313.
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