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The combined effects of Fe and H2 on the nitridation of silicon

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Journal of Materials Science Letters

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References

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Author notes

  1. Nancy J. Shaw

    Present address: Department of Ceramics, University of Leeds, LS2 9JT, Leeds, UK

Authors and Affiliations

  1. National Aeronautical and Space Administration, Lewis Research Center, 44135, Cleveland, Ohio, USA

    Nancy J. Shaw

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  1. Nancy J. Shaw
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Shaw, N.J. The combined effects of Fe and H2 on the nitridation of silicon. J Mater Sci Lett 1, 337–340 (1982). https://doi.org/10.1007/BF00726480

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  • DOI: https://doi.org/10.1007/BF00726480

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