A Grid Reactor with Low Ion Bombardment Energy for Large Area PECVD of Thin Film Silicon Solar Cells
2013
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Details
Title
A Grid Reactor with Low Ion Bombardment Energy for Large Area PECVD of Thin Film Silicon Solar Cells
Author(s)
Chesaux, Michaël
Advisor(s)
Date
2013
Publisher
Lausanne, EPFL
Keywords
Language
English
Other identifier(s)
urn: urn:nbn:ch:bel-epfl-thesis5686-3
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Scientific production and competences > EPFL Theses
Work produced at EPFL
Published
Theses
Scientific production and competences > EPFL Theses
Work produced at EPFL
Published
Theses
Record creation date
2013-03-18