Specialised Power Supply for Magnetron Plasma Sources

Andrzej Gospodarczyk

doi:10.4028/www.scientific.net/SSP.237.245

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HomeSolid State PhenomenaSolid State Phenomena Vol. 237Specialised Power Supply for Magnetron Plasma...

Specialised Power Supply for Magnetron Plasma Sources

Abstract:

Magnetron plasma sources, due to their simplicity and reliability, are widely used in industrial stands for PVD technology. Despite their significant popularity, there still exists the problem with their power supply systems, especially in applications that require precise adjustment of the composition of the produced layers. This paper presents one possible solution to this problem: The high-resolution power supply for magnetron plasma sources with triple processing, dedicated for power systems of PVD equipment. The module for power factor correction (PFC) is described as well as the module for increasing the resolution setting of the output waveform, and the DC/DC converter module with fast dynamic response to changes in output parameters. The results of experimental studies of individual modules are presented.

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Periodical:

Solid State Phenomena (Volume 237)

Pages:

245-250

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.237.245

Citation:

Cite this paper

Online since:

August 2015

Authors:

Andrzej Gospodarczyk*

Keywords:

Ac/Dc Converter, DC-DC Full Bridge Converter, Power Supply for Magnetron Plasma Source, Step-Down DC-DC Converter

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* - Corresponding Author

References

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