Measurement of Residual Stresses in Thin Films by Two-Dimensional XRD

Article Preview

Abstract:

This paper introduces the recent progress in two-dimensional X-ray diffraction as well as its applications in residual stress analysis in thin films. The stress measurement with twodimensional x-ray diffraction can be done with low incident angle and is not limited to the peaks with high two-theta angles like the conventional method. When residual stresses of thin films are measured, a low incident angle is preferred to maximize the diffraction signals from the thin films surfaces instead of from the substrates and matrix materials. Since one stress measurement at one fixed incident angle is possible, stress gradients in depth can be measured by series of incident angles. Some experimental examples are given to show the stress measurement at low and fixed incident angle.

You might also be interested in these eBooks

Info:

Periodical:

Materials Science Forum (Volumes 524-525)

Pages:

613-618

Citation:

Online since:

September 2006

Authors:

Export:

Price:

[1] I. C. Noyan, Defining Residual Stresses in Thin Film Structure, Advances in X-ray Analysis, Vol. 35, edited by C. S. Barrett, et. al., Plenum Press, New York, (1992).

Google Scholar

[2] L. Yu, B. Hendrix, K. Xu, J. He, H. Gu, X-ray Residual Stress Measurement in Thin Films with Crystallographic Texture and Grain Shape, Mat. Res. Soc. Symp. Proc. Vol. 403, (1996).

DOI: 10.1557/proc-403-177

Google Scholar

[3] S. Rao, B. He and C. Houska, X-ray Diffraction Analysis of Concentration and Residual Stress Gradients in Nitrogen-implanted Niobium and Molybdenum, J. Appl. Phys. 69 (12), 15 June (1991).

DOI: 10.1063/1.347461

Google Scholar

[4] V. Hauk, Stress Evaluation on Materials Having Non-linear Lattice Strain Distribution, Advances in X-ray Analysis, Vol. 27, pp.101-120, (1984).

DOI: 10.1007/978-1-4613-2775-2_14

Google Scholar

[5] Bob B. He, Introduction to two-dimensional X-ray diffraction, Powder Diffraction, Vol. 18, No 2, June (2003).

Google Scholar

[6] B. B. He and K. L. Smith, Fundamental Equation of Strain and Stress Measurement Using 2D Detectors, Proceedings of 1998 SEM Spring Conference on Experimental and Applied Mechanics, Houston, Texas, USA (1998).

Google Scholar

[7] I. C. Noyan and J. B. Cohen, Residual Stress, Spinger-Verlag, New York, (1987).

Google Scholar

[8] B. D. Cullity, Elements of X-ray Diffraction, Addison Wesley, Reading, MA, (1978).

Google Scholar

[9] V. Hauk and B. Kruger, A New Approach to Evaluate Steep Stress Gradients Principally Using Layer Remove, Material Science Forum, Vol. 347-349, pp.80-82, (2000).

DOI: 10.4028/www.scientific.net/msf.347-349.80

Google Scholar

[10] H. K. Tonshoff, J. Ploger and H. Seegers, Determination of Residual Stress Gradients in Brittle Materials Using an Improved Spline Algorithm, Material Science Forum, Vol. 347349, pp.83-88, (2000).

DOI: 10.4028/www.scientific.net/msf.347-349.83

Google Scholar

[11] Jakub Koo and Jaak Valgur, Layer Growing/Removing Method for the Determination of Residual Stresses in Thin Inhomogeneous Discs, Material Science Forum, Vol. 347-349, pp.89-94, (2000).

DOI: 10.4028/www.scientific.net/msf.347-349.89

Google Scholar

[12] P. Huang, K. Xu, B. He and Y. Han, An Investigation of Residual Stress of Porous Titania Layer by Micro-arc Oxidation under Different Voltages, Materials Science Forum, Vols. 490-491, pp.552-557, (2004).

DOI: 10.4028/www.scientific.net/msf.490-491.552

Google Scholar

[13] B. B. He, K. Xu, F. Wang and P. Huang, Two-dimensional X-ray Diffraction for Structure and Stress Analysis, Materials Science Forum, Vols. 490-491, pp.1-6, (2004).

DOI: 10.4028/www.scientific.net/msf.490-491.1

Google Scholar