A Review of Test Structures for Characterising Microelectronic and MEMS Technology
p.356
p.356
Friction Drive Simulation of a SAW Motor with Slider Surface Texture Variation
p.366
p.366
MEMS Rotational Actuator for High Force and Large Displacement
p.372
p.372
Design and Fabrication of a Horizontal Thermal Micro-Actuator with Integrated Micro Tweezers
p.378
p.378
Three-Axis MEMS Threshold Accelerometer Switch for Enhanced Power Conservation of MEMS Sensors
p.384
p.384
Electromechanical Behavior of Single and Multiwall Carbon Nanotubes
p.390
p.390
The Promise of Nano and Micro Systems for Meeting the Emerging Demands of the US Army
p.396
p.396
Fully Integrated Bridge-Type Anemometer in LTCC-Based Microfluidic Systems
p.401
p.401
Strain Enhancement within Cantilevered, Piezoelectric MEMS Energy Scavenging Devices
p.405
p.405
Three-Axis MEMS Threshold Accelerometer Switch for Enhanced Power Conservation of MEMS Sensors
Abstract:
A no-power 3-axis bidirectional MEMS threshold accelerometer is presented in this paper. Threshold accelerometers of 25g, 50g, and 100g were designed and fabricated on a single 3mm chip. The design is based on a conductive spring-mass system made of Au metal layers that close a switch between two metal contacts when the designed threshold is exceeded. We present the MEMS threshold accelerometer switch fabrication process and provide an analytical and experimental framework for the device performance
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Info:
Periodical:
Advances in Science and Technology (Volume 54)
Pages:
384-389
Citation:
Online since:
September 2008
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