Simulation of Large Scale KDP Crystal Polishing by Computer Controlled Micro-Nano Deliquescence

He Ping Zhang; Dong Ming Guo; Xu Wang; Hang Gao

doi:10.4028/www.scientific.net/AMR.497.165

Paper Titles

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XTEM Observation of 4H-SiC (0001) Surfaces Processed by Plasma Assisted Polishing
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Plasma Chemical Vaporization Machining of Silicon Carbide Wafer Using Flat-Bar Electrode with Multiple Gas Nozzles
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Simulation of Large Scale KDP Crystal Polishing by Computer Controlled Micro-Nano Deliquescence
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The Composite Ultra-Precision Processing Technology for the Small Aspheric Mould of Stainless Steel
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Analyze and Verify Cutting Depth Distribution of Different Grits Size SFAP
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CVD Diamond Film Polishing Based on Accelerant Theory
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 497Simulation of Large Scale KDP Crystal Polishing by...

Simulation of Large Scale KDP Crystal Polishing by Computer Controlled Micro-Nano Deliquescence

Abstract:

Although Single Point Diamond Turning (SPDT) can do pretty well in optical surfacing of large scale KDP crystal, both the surface accuracy and integrity are considerably high; meanwhile as the defects of micro-waveness and stress are inevitable, the laser-induced damage threshold of KDP optical elements after SPDT still cannot be satisfied. Because of the characters of deliquescent and water-soluble, the process of computer controlled Micro-nano deliquescence is attempted to remove the residual micro-waveness on KDP surface after SPDT. Based on the assumption of Preston and the characters of Micro-nano deliquescence, the model of material removal ratio is suggested, the dwell time for ascertained KDP surface is solved, the processing of computer controlled Micro-nano deliquescence is simulated and the processed surface condition on theory is obtained. Besides, the influences of different parameters on the surfacing efficiency and accuracy are analyzed. Finally, three polishing tracks are comparatively analyzed. The simulation results are quite important in guiding the experimental polishing of large scale KDP by computer controlled Micro-nano deliquescence