Low Cost Diffuser Based Micropump Using Pinch Actuation

Pei Song Chee; Ruzairi Abdul  Rahim; U. Hashim; Rashidah Arsat; Pei Ling Leow

doi:10.4028/www.scientific.net/AMR.422.397

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 422Low Cost Diffuser Based Micropump Using Pinch...

Low Cost Diffuser Based Micropump Using Pinch Actuation

Abstract:

Planar pinch micropump with the integration of two diffuser valve elements has been reported. The fabrication of the micropump is carried out by utilizing simple hot embossing technique for microdiffuser imprinting and spin coating for membrane construction. Parameter of diffuser design is optimized via finite element analysis (FEA). The experiment result shows that the pump works well at low frequency of 29 Hz.

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Periodical:

Advanced Materials Research (Volume 422)

Pages:

397-400

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.422.397

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Online since:

December 2011

Authors:

Pei Song Chee, Ruzairi Abdul Rahim, U. Hashim, Rashidah Arsat, Pei Ling Leow

Keywords:

Diffuser Based Micropump, Electromagnetic Micropump, Pinch Actuation

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