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Review of electronic speckle pattern interferometry (ESPI) for three dimensional displacement measurement

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Abstract

Three dimensional(3D) displacements, which can be translated further into 3D strain, are key parameters for design, manufacturing and quality control. Using different optical setups, phase-shift methods, and algorithms, several different 3D electronic speckle pattern interferometry(ESPI) systems for displacement and strain measurements have been achieved and commercialized. This paper provides a review of the recent developments in ESPI systems for 3D displacement and strain measurement. After an overview of the fundamentals of ESPI theory, temporal phase-shift, and spatial phase-shift techniques, 3D deformation measurements by the temporal phase-shift ESPI system, which is suited well for static measurement, and by the spatial phase-shift ESPI system, which is particularly useful for dynamic measurement, are discussed. For each method, the basic theory, a brief derivation and different optical layouts are presented. The state of art application, potential and limitation of the ESPI systems are shown and demonstrated.

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References

  1. YANG L X, COLBOURNE P. Digital laser micro-interferometer and its applications[J]. Optical Engineering, 2003, 42(5): 1 417–1 426.

    Article  Google Scholar 

  2. OHLSSON R, WIHLBORG A, WESTHERG H. The accuracy of fast 3D topography measurements[J]. International Journal of Machine Tools and Manufacture, 2001, 41(13): 1 899–1 907.

    Article  Google Scholar 

  3. FU Yongqi, KOK N, BRYAN A. Microfabrication of microlens array by focused ion beam technology[J]. Microelectronic Engineering, 2000, 54(3): 211–221.

    Article  Google Scholar 

  4. GENSLER H M, MENG E. Rapid fabrication and characterization of MEMS Parylene C bellows for large deflection applications[J]. Journal of Micromechanics and Microengineering, 2012, 22(11):115031.

    Article  Google Scholar 

  5. REMBE C, MULLER R S. Measurement system for full three-dimensional motion characterization of MEMS[J]. Journal of Microelectromechanical Systems, 2002, 11(5): 479–488.

    Article  Google Scholar 

  6. CHEN Xu, XU Nan, YANG L X, et al. High temperature displacement and strain measurement using a monochromatic light illuminated stereo digital image correlation system[J]. Measurement Science and Technology, 2012, 23(12): 125603

    Article  Google Scholar 

  7. WU SIJIN, HE Xiaoyuan, YANG L X. Enlarging the angle of view in Michelson-interferometer-based shearography by embedding a 4f system[J]. Applied Optics, 2011, 50(21): 3 789–3 794.

    Article  Google Scholar 

  8. YANG L X, ETTEMEYER A. Strain measurement by three-dimensional electronic speckle pattern interferometry: potentials, limitations, and applications[J]. Optical Engineering, 2003, 42(5):1 257–1 266.

    Article  Google Scholar 

  9. CHEN Xu, YANG L X, XU Nan, et al. Cluster approach based multi-camera digital image correlation: Methodology and its application in large area high temperature measurement[J]. Optics & Laser Technology, 2013, http://dx.doi.org/10.1016/j.optlastec. 2013. 08.005.

    Google Scholar 

  10. CHEN F, BROWN G M, SONG M. Overview of three-dimensional shape measurement using optical methods[J]. Optical Engineering, 2000, 39(1): 10–22.

    Article  Google Scholar 

  11. SCHNARS U, JUPTNER W P. Digital recording and numerical reconstruction of holograms[J]. Measurement Science and Technology, 2002, 13(9): R85.

    Article  Google Scholar 

  12. YANG L X, ZHANG Ping, LIU Sheng, et al. Measurement of strain distributions in mouse femora with 3D-digital speckle pattern interferometry[J]. Optics and Lasers in Engineering, 2007, 45(8): 843–851.

    Article  Google Scholar 

  13. XU Nan, XIE Xin, HARMON G, et al. Quality inspection of spot welds using digital shearography[J]. SAE International Journal of Materials & Manufacturing, 2012, 5(1): 96–101.

    Google Scholar 

  14. MOORE A J, TYRER J R. An electronic speckle pattern interferometer for complete in-plane displacement measurement[J]. Measurement Science and Technology, 1990, 1(10): 1 024.

    Article  Google Scholar 

  15. TONG Jingwei, ZHANG Dongsheng, LI Hongqi, et al. Study on in-plane displacement measurement under impact loading using digital speckle pattern interferometry[J]. Optical Engineering, 1996, 35(4): 1 080–1 083.

    Article  Google Scholar 

  16. DantecDynamics, ESPI-Q100[OL]. http://www.dantecdynamics.com/Default.aspx?ID=853.

  17. Laser Technology Inc., Laser Shearography Technology[OL]. http://www.laserndt.com/technology/shearography.htm.

  18. ZHU Lianqing, WANG Yonghong, XU Nan, et al. Real-time monitoring of phase maps of digital shearography[J]. Optical Engineering, 2013, 52(10): 101902.

    Article  Google Scholar 

  19. SITOHI R S, BURKE J, HELMERS H, et al. Spatial phase shifting for pure in-plane displacement and displacement-derivative measurements in electronic speckle pattern interferometry (ESPI)[J]. Applied optics, 1997, 36(23): 5 787–5 791.

    Article  Google Scholar 

  20. ZHANG Jingbo. Two-dimensional in-plane electronic speckle pattern interferometer and its application to residual stress determination[J]. Optical Engineering, 1998, 37(8): 2 402–2 409.

    Article  Google Scholar 

  21. TAKEDA M, YAMAMOTO H. Fourier-transform speckle profilometry: three-dimensional shape measurements of diffuse objects with large height steps and/or spatially isolated surfaces[J]. Applied Optics, 1994, 33(34): 7 829–7 837.

    Article  Google Scholar 

  22. JOENATHAN C, FRANZE B, HAIBLE P, et al. Speckle interferometry with temporal phase evaluation for measuring large-object deformation[J]. Applied Optics, 1998, 37(13): 2 608–2 614.

    Article  Google Scholar 

  23. KAO C C, YEH G B, LEE S S, et al. Phase-shifting algorithms for electronic speckle pattern interferometry[J]. Applied Optics, 2002, 41(1): 46–54.

    Article  Google Scholar 

  24. WANG Liusheng, JAMBUNATHAN K, DOBBINS B N, et al. Measurement of three-dimensional surface shape and deformations using phase stepping speckle interferometry[J]. Optical Engineering, 1996, 35(8): 2 333–2 340.

    Article  Google Scholar 

  25. SHIBAYAMA K, UCHIYAMA H. Measurement of threedimensional displacements by hologram interferometry[J]. Applied Optics, 1971, 10(9): 2 150–2 154.

    Article  Google Scholar 

  26. MARTINEZ A, RAYAS J A, RODRIGUEZ-VERA R, et al. Three-dimensional deformation measurement from the combination of in-plane and out-of-plane electronic speckle pattern interferometers[J]. Applied optics, 2004, 43(24): 4 652–4 658.

    Article  Google Scholar 

  27. Dantec Dynamics, ESPI-Q300[OL]. http://www.dantecdynamics.com/Default.aspx?ID=854.

  28. SJODAHL M, SALDNER H O. Three-dimensional deformation field measurements with simultaneous TV holography and electronic speckle photography[J]. Applied Optics, 1997, 36(16):3 645–3 648.

    Article  Google Scholar 

  29. FRICKE-BEGEMANN T. Three-dimensional deformation field measurement with digital speckle correlation[J]. Applied Optics, 2003, 42(34): 6 783–6 796.

    Article  Google Scholar 

  30. YAMAGUCHI I, FUJITA T. Linear and rotary encoders using electronic speckle correlation[J]. Optical Engineering, 1991, 30(12):1 862–1 868.

    Article  Google Scholar 

  31. SEOKHO N, YAMAGUCHI I. Two-dimensional measurement of strain distribution by speckle correlation[J]. Japanese Journal of Applied Physics, 1992, 31(9A): 1 299–1 299.

    Google Scholar 

  32. TAKEDA M, Gu Q, KINOSHITA M, TAKAI H, et al. Frequency-multiplex Fourier-transform profilometry: a single-shot three-dimensional shape measurement of objects with large height discontinuities and/or surface isolations[J]. Applied Optics, 1997, 36(22): 5 347–5 354.

    Article  Google Scholar 

  33. KOLENOVIC E, OSTEN W, KLATTENHOFF R, et al. Miniaturized digital holography sensor for distal three-dimensional endoscopy[J]. Applied Optics, 2003, 42(25): 5 167–5 172.

    Article  Google Scholar 

  34. GONG X L, TOYOOKA S. Investigation on mechanism of plastic deformation by digital speckle pattern interferometry[J]. Experimental Mechanics, 1999, 39(1): 25–29.

    Article  Google Scholar 

  35. RESTIVO G, CLOUD G L, BEAUDRY R, et al. 3-D Strain fields using embedded DSPI: pilot study[C]//Proceedings of the 2004 SEM X International Congress and Exposition on Experimental and Applied Mechanics, 2004: 178–185.

    Google Scholar 

  36. BAIK S H, PARK S K, KIM C J, et al. Two-channel spatial phase shifting electronic speckle pattern interferometer[J]. Optics Communications, 2001, 192(3): 205–211.

    Article  Google Scholar 

  37. BURKE J, HELMERS. Performance of spatial vs. temporal phase shifting in ESPI[C]//Proc. SPIE, 1999, 3 744(99): 188–199.

    Article  Google Scholar 

  38. BURKE J, HELMERS H, KUNZE C, et al. Speckle intensity and phase gradients: influence on fringe quality in spatial phase shifting ESPI-systems[J]. Optics Communications, 1998, 152(1): 144–152.

    Article  Google Scholar 

  39. TAY C J, FU Yu. Determination of curvature and twist by digital shearography and wavelet transforms[J]. Optics Letters, 2005, 30(21): 2 873–2 875.

    Article  Google Scholar 

  40. KREIS T. Digital holographic interference-phase measurement using the Fourier-transform method[J]. Journal of the Optical Society of America A, 1986, 3(6): 847–855.

    Article  Google Scholar 

  41. HAINES K A, HILDEBRAND B P. Surface-deformation measurement using the wavefront reconstruction technique[J]. Applied Optics, 1966, 5(4): 595–602.

    Article  Google Scholar 

  42. FU Yu, Guo Ming, LIU H. Determination of instantaneous curvature and twist by digital shearography[J]. Optical Engineering, 2012, 51(8): 083602-1.

    Article  Google Scholar 

  43. PEDRINI G, ZOU Y L, TIZIANI H J. Quantitative evaluation of digital shearing interferogram using the spatial carrier method[J]. Pure and Applied Optics: Journal of the European Optical Society Part A, 1999, 5(3): 313.

    Article  Google Scholar 

  44. PEDRINI G, OSTEN W, GUSEV M E. High-speed digital holographic interferometry for vibration measurement[J]. Applied Optics, 2006, 45(15): 3 456–3 462.

    Article  Google Scholar 

  45. KOHLER C, VIOTTI M R, ALBERTAZZI G A. Measurement of three-dimensional deformations using digital holography with radial sensitivity[J]. Applied Optics, 2010, 49(20): 4 004–4 009.

    Article  Google Scholar 

  46. BHADURI B, MOHAN N K, KOTHIYAL M P. Simultaneous measurement of out-of-plane displacement and slope using a multiaperture DSPI system and fast Fourier transform[J]. Applied Optics, 2007, 46(23): 5 680–5 686.

    Article  Google Scholar 

  47. PEDRINI G, Zou Y L, TIZIANI H J. Simultaneous quantitative evaluation of in-plane and out-of-plane deformations by use of a multidirectional spatial carrier[J]. Applied Optics, 1997, 36(4): 786–792.

    Article  Google Scholar 

  48. SCHEDIN S, PEDRINI G, TIZIANI H J, et al. Simultaneous three-dimensional dynamic deformation measurements with pulsed digital holography[J]. Applied Optics, 1999, 38(34): 7 056–7 062.

    Article  Google Scholar 

  49. BHADURI B, MOHAN N K, KOTHIYAL M P, et al. Use of spatial phase shifting technique in digital speckle pattern interferometry (DSPI) and digital shearography(DS)[J]. Optics Express, 2006, 14(24): 11 598–11 607.

    Article  Google Scholar 

  50. XIE Xin, XU Nan, SUN Jianfei, et al. Simultaneous measurement of deformation and the first derivative with spatial phase-shift digital shearography[J]. Optics Communications, 2012, 286(1): 277–281.

    Google Scholar 

  51. XIE Xin, YANG L X, XU Nan, et al. Michelson interferometer based spatial phase shift shearography[J]. Applied Optics, 2013, 52(17): 4 063–4 071.

    Article  Google Scholar 

  52. FUNG Y C. A first course in continuum mechanics: for physical and biological engineers and scientists[M]. Englewood Cliffs, NJ: Prentice-Hall, 1994.

    Google Scholar 

  53. LIU Sheng, THOMAS D, PRAVEEN R, et al. Vibration measurement of MEMS by digital laser microinterferometer[C]// Proc. SPIE, 2005, 5 878: 103–111.

    Google Scholar 

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Correspondence to Lianxiang Yang.

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The project is supported by National Natural Science Foundation of China (Grant Nos. 51275054, 51075116)

YANG Lianxiang received his PhD degree in mechanical engineering from the University of Kassel, Germany, in 1997. He is the director of optical laboratory and a professor in the department of mechanical engineering at Oakland University in USA. Prior to joining Oakland University in 2001, he was a R&D scientist at JDS-Uniphase, Canada, from 2000 to 2001, a senior engineer at Dantec-Ettemeyer AG(currently called Dantec-Dynamics GmbH), Germany, from 1998 to 2000, a research and senior research fellow at the University of Kassel, Germany, from 1991 to 1998, and a lecture at Hefei University of Technology, China, from 1986 to 1991. He has multi-disciplinary research experiences including optical metrology, experimental strain/stress analysis, nondestructive testing, and 3D computer vision. He is a fellow of SPIE, a Changjiang Scholar of Hefei University of Technology, China, and an adjunct professor of Beijing Information Science &Technology University, China.

XIE Xin is currently a PhD candidate at Optical Lab, Oakland University, United State of America. He received his bachelor of engineering in precise mechanical engineering from Hefei University of Technology in 2010 and master of science in mechanical engineering from Oakland University in 2012. His main research interests include optical metrology, phase-shift technology, digital shearography, non-destructive testing.

ZHU Lianqing is a professor of the School of Instruments Science & Optoelectronic Engineering, Beijing Information Science &Technology University, China. He has multi-disciplinary research experiences including optical metrology, biomedical detection technology and 3D computer vision. He is the director of Beijing Engineering Research Center of Photoelectric Information and Instruments, a council member of Chinese Society for Measurement, an executive member of the council and assistant secretary general at Mechanical Quantity Measurement Instrument Federation of China Instrument and Control Society.

WU Sijin received his PhD degree in optical engineering from Beijing Jiaotong University, China in 2012. Prior to receiving his PhD degree, he was an exchanged PhD candidate in the Optical Laboratory at Oakland University for two years. He joined Beijing Information Science & Technology University in July 2012 as a faculty member. His research interests include optical metrology, such as digital holography and digital shearography, experimental strain/stress analysis, nondestructive testing, 3D computer vision, etc.

WANG Yonghong received his PhD degree in precision mechanical engineering from Hefei University of Technology, China, in 2004. He was a postdoctoral fellow in the optical laboratory at Oakland University in Michigan from 2007 to 2008. He is currently a professor in the school of instrument science and opto-electronic engineering, Hefei University of Technology. He has authored and co-authored over 30 scientific research papers, owned 4 Chinese patents in the areas of optical techniques for whole-field and 3D measurement. His current research interests are precision metrology, advanced optical measuring techniques and image processing and their applications for the automotive, high-tech, and biomedical industries.

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Yang, L., Xie, X., Zhu, L. et al. Review of electronic speckle pattern interferometry (ESPI) for three dimensional displacement measurement. Chin. J. Mech. Eng. 27, 1–13 (2014). https://doi.org/10.3901/CJME.2014.01.001

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  • DOI: https://doi.org/10.3901/CJME.2014.01.001

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