A deposition of c-axis oriented hexagonal barium ferrite thin films was attempted by means of an alternate periodic deposition of S (Fe₂O₃) and R(BaFe₆O₁₀) layers. All of the films obtained in this study had (001) texture, although they also contained a spinel phase with (111) orientation. Crystallite size in the film depends on the ratio of the thickness of the S layer to that of the R layer, and increased as this ratio increased. M-type barium ferrite (BaM) thin films with excellent c-axis orientation were obtained when the thickness of the S and R layers were 4.7 Å and 6.9 Å, respectively. We also tried to form the W-type barium ferrite (BaW) film by depositing S layers 9.3 Å thick and R layers 6.9 Å thick altemately. The film, however, did not contain the BaW crystallites and was a mixture of BaM and the spinel-type crystallites.