We have investigated the generation of spherical carbon particles, using the columnar type plasmas excited vertically at the pressure of 1×10−1 Pa composed of CH4-Ar mixed gas. It is found that the spherical carbon particles of micrometer sizes grow in the plasma sheath only when Si(100) substrate temperature and contents of CH4 are near 1066 K and near 18%, respectively. The result of high resolution SEM and high resolution TEM observations strongly suggest the growth of elementary particles of ca. 10 nm which including carbon onions of ca. 2-4 nm in the plasma.
