Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
Roll-to-Roll UV Imprint for Bottom-up Transistor Fabrication
P. MauryN. StroeksM. WijnenR. TackenR. van der Werf
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2011 Volume 24 Issue 1 Pages 43-45

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Abstract

We propose a design to fabricate transistors on flexible substrates in a bottom-up fashion using R2R UV-imprint lithography. The design consists of a template composed of multilevel as well as gray level features, the later used to facilitate device interconnection. A hard mold is fabricated by LBR and a flexible Ni replica is done using Ni electroplating. The flexible stamp is used in the R2R UV imprint machine with PET as flexible substrate. Imprints were performed at a speed of 0.35m/min and show a high level of replication of the multilevel as well as gray level features.

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© 2011 The Society of Photopolymer Science and Technology (SPST)
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