Tribology Online
Online ISSN : 1881-2198
ISSN-L : 1881-218X
Article in the Symposium Sessions
Vertical-Objective-Based Ellipsometric Microscope for Real-Time Observation of nm-Thick Lubricant Films
Liu QingqingKenji FukuzawaYosuke KajiharaHedong ZhangShintaro Itoh
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JOURNAL FREE ACCESS

2012 Volume 7 Issue 3 Pages 139-146

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Abstract

The vertical-objective-based ellipsometric microscope (VEM) is expected to be a useful method for clarifying the lubrication phenomena that uses thin liquid lubricants, especially the lubricant for hard disk drives (HDDs). Although the feasibility of VEM for thin lubricant films was confirmed, the designs for the optical system and image detection have not been established. In this report, the optical design of the VEM is presented, as well as the method of controlling the coherent noises and improving the thickness resolution is discussed. By our method, the thickness resolution of VEM can be improved to 0.4 nm, and the real-time observation of sub-nm-thick thin liquid lubricant films can also be achieved.

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© 2012 by Japanese Society of Tribologists
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