Author(s)

Risheng Liu, Qin Sh, Anping Qiu, Guoming Xia, Yazhou Wang, Yang Zhao, Dan Zhang, Jing Wang

Corresponding Author

Yang Zhao

ABSTRACT

This paper demonstrates a low-power oscillating circuit for MEMS gyroscopes which employs a chopper in driving-loop to realize bias drift cancellation. As a result of the misalignment of comb fingers inside microgyroscopes, driving force may give rise to a sensing-axis component which leads to the bias drift. By periodically chopping the driving-loop and sampling the bias when driving loop is open, sense mode output without drive-induced errors can be got. This method greatly improved the long-term stability of MEMS gyroscopes and the system power consumption is reduced to 95mW from 768mW.

KEYWORDS

Bias Drift, Low-Power Circuit, Mems Gyroscopes