Rapid Synthesis of Yttria-Stabilized Zirconia Films by Laser Chemical Vapor Deposition

Teiichi Kimura; Takashi Goto

doi:10.2320/matertrans.44.421

MATERIALS TRANSACTIONS

Online ISSN : 1347-5320
Print ISSN : 1345-9678
ISSN-L : 1345-9678

Rapid Synthesis of Yttria-Stabilized Zirconia Films by Laser Chemical Vapor Deposition

Teiichi Kimura, Takashi Goto

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Keywords: yttria stabilized zirconia, laser chemical vapor deposition, high deposition rate, thermal barrier coatings

JOURNAL FREE ACCESS

2003 Volume 44 Issue 3 Pages 421-424

DOI https://doi.org/10.2320/matertrans.44.421

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Abstract

Yttria stabilized zirconia (YSZ) films were synthesized at a high deposition rate of 180 nm/s (660 μm/h) by laser chemical vapor deposition (laser CVD) using Zr(dpm)₄ and Y(dpm)₃ precursors. Morphology of YSZ films changed from columnar to cone structure with increasing deposition rate. YSZ films with the columnar structure showed significant (200) orientation.

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