Serbian Journal of Electrical Engineering 2020 Volume 17, Issue 1, Pages: 111-129
https://doi.org/10.2298/SJEE2001111V
Full text ( 1850 KB)
Analyses of the surface parameters in polycrystalline diamonds
Veljković Sandra (University of Niš, Faculty of Electronic Engineering, Niš, Serbia)
Mitić Vojislav (University of Niš, Faculty of Electronic Engineering, Niš, Serbia + Institute of Technical Sciences, Belgrade, Serbia)
Paunović Vesna (University of Niš, Faculty of Electronic Engineering, Niš, Serbia)
Lazović Goran (University of Belgrade, Faculty of Mechanical Engineering, Belgrade, Serbia)
Mohr Markus (University of Ulm, Institute of Functional Nanosystems FNS, Albert-Einstein-Allee, Ulm, Germany)
Fecht Hans (University of Ulm, Institute of Functional Nanosystems FNS, Albert-Einstein-Allee, Ulm, Germany)
There is a progressing interests for polycrystalline diamonds and they have
been more extensively used recently. This area has been intensively
researched due to the outstanding potential of this material, and this
necessitated presenting some of the latest application related to
engineering in this paper. A better insight of polycrystalline diamonds
properties can be achieved by intensively researching the surface structure.
Samples of nanocrystalline diamonds grown by the chemical vapor deposition
method are analyzed and accordingly, the focus of the research was the
surface parameters and their structure. It is observed that waviness and
texture are unique for any direction, their values are almost the same for
the chosen directions and they vary approximately from -0.2 nm to 0.4 nm.
Analyses of the parameters allowed a more detailed insight into the
morphology of the surfaces of polycrystalline films.
Keywords: Polycrystalline diamonds, Microelectronic devices, MEMS, Surface properties
Project of the Serbian Ministry of Education, Science and Technological Development, Grant no. OI 172057