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Table of contents (7 chapters)
About this book
Silicon-on-Insulator (SOI) technology is widely used in high-performance and low-power semiconductor devices. The SOI wafers have two layers of active silicon (Si), and normally the bottom Si layer is a mere physical structure. The idea of making intelligent pixel detectors by using the bottom Si layer as sensors for X-ray, infrared light, high-energy particles, neutrons, etc. emerged from very early days of the SOI technology. However, there have been several difficult issues with fabricating such detectors and they have not become very popular until recently.
This book offers a comprehensive overview of the basic concepts and research issues of SOI radiation image detectors. It introduces basic issues to implement the SOI detector and presents how to solve these issues. It also reveals fundamental techniques, improvement of radiation tolerance, applications, and examples of the detectors.
Since the SOI detector has both a thick sensing region and CMOS transistors in amonolithic die, many ideas have emerged to utilize this technology. This book is a good introduction for people who want to develop or use SOI detectors.
Authors and Affiliations
About the authors
Bibliographic Information
Book Title: Radiation Imaging Detectors Using SOI Technology
Authors: Yasuo Arai, Ikuo Kurachi
Series Title: Synthesis Lectures on Emerging Engineering Technologies
DOI: https://doi.org/10.1007/978-3-031-02033-9
Publisher: Springer Cham
eBook Packages: Synthesis Collection of Technology (R0), eBColl Synthesis Collection 7
Copyright Information: Springer Nature Switzerland AG 2017
Softcover ISBN: 978-3-031-00905-1Published: 15 February 2017
eBook ISBN: 978-3-031-02033-9Published: 01 June 2022
Series ISSN: 2381-1412
Series E-ISSN: 2381-1439
Edition Number: 1
Number of Pages: XI, 59
Topics: Engineering, general, Electrical Engineering, Circuits and Systems, Computer Hardware, Materials Science, general, Surfaces and Interfaces, Thin Films