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Title: Atomic force microscope: Enhanced sensitivity

Technical Report ·
DOI:https://doi.org/10.2172/93754· OSTI ID:93754

Atomic force microscopes (AFMs) are a recent development representing the state of the art in measuring ultrafine surface features. Applications are found in such fields of research as biology, microfabrication, material studies, and surface chemistry. Fiber-optic interferometer techniques developed at LLNL offer the potential of improving the vertical resolution of these instruments by up to 2 orders of magnitude. We are attempting to replace the current AFM measurement scheme, which consists of an optical beam deflection approach, with our fiber-optic interferometer scheme, a much more sensitive displacement measurement technique. In performing this research, we hope to accomplish two important goals; (1) to enhance the sensitivity of the AFM, and (2) to achieve important improvements in our fiber-optic interferometer technology.

Research Organization:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE, Washington, DC (United States)
DOE Contract Number:
W-7405-ENG-48
OSTI ID:
93754
Report Number(s):
UCRL-ID-119684; ON: DE95016072; TRN: 95:006257
Resource Relation:
Other Information: PBD: Jun 1995
Country of Publication:
United States
Language:
English