Final report for ER54440, ''Measurement and modeling of low energy (910 to 1000 eV) sputtering and reflection''
This report is a compilation of the three annual progress reports. All detail can be found in the refereed publications enumerated within.
- Research Organization:
- University of Illinois, Urbana, IL (US)
- Sponsoring Organization:
- USDOE Office of Energy Research (ER) (US)
- DOE Contract Number:
- FG02-97ER54440
- OSTI ID:
- 771262
- Report Number(s):
- DOE/ER/54440-1; TRN: US200308%%173
- Resource Relation:
- Other Information: PBD: 20 Nov 2000; PBD: 20 Nov 2000
- Country of Publication:
- United States
- Language:
- English
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