Surface roughening, columnar growth and intrinsic stress formation in amorphous CuTi films
- Physikalisches Inst., Goettingen (Germany)
- Argonne National Lab., IL (United States)
The growth of amorphous CuTi films, prepared by electron beam evaporation, is investigated by Scanning Tunneling Microscopy (STM), Small Angle Neutron Scattering (SANS) and in situ measurements of intrinsic mechanical stresses (ISM). In early growth stages the films develop compressive stresses and, with increasing film thickness, a crossover to tensile stresses. In the same thickness range the STM investigations show a change in the growth mode. The experiments suggest a transition from planar growth with statistical surface roughening to columnar growth.
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- USDOE Office of Energy Research, Washington, DC (United States)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 541867
- Report Number(s):
- ANL/IPNS/CP-92694; CONF-971201-; ON: DE97008616; TRN: AHC29723%%86
- Resource Relation:
- Conference: 1997 fall meeting of the Materials Research Society, Boston, MA (United States), 1-5 Dec 1997; Other Information: PBD: [1997]
- Country of Publication:
- United States
- Language:
- English
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