分析化学
Print ISSN : 0525-1931
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感光性エポキシ樹脂をエッチングマスクとして用いる電気泳動マイクロチャンネルチップの作製
白石 晴樹川中 智司松田 十四夫田畑 修池田 重良
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2000 年 49 巻 12 号 p. 1037-1041

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In this paper, we present a new fabrication method that uses a UV-sensitive epoxy resin as an etching mask for a micro-channel electrophoresis chip. We have used it to separate fluorescein and fluorescein-5-sulfonic acid. The device was fabricated in a 50mm square of soda glass by using micro-lithographic patterning and wet etching techniques. The proposed method does not need for plating and etching of Au/Cr masks. An etched bottom plate was covered with a top plate drilled access holes into it and permanently bonded in an oven by heating at 560∼580°C. The chip had a separation channel and a sample injection channel. The separation channel was 80μm wide and 20μm deep. Using a micro-fabricated chip with a separation length of 10mm and a separation voltage of 800V, the electrophoresis of a fluorescein and fluorescein-5-sulfonic acid mixture gave two well-separated peaks. Detection was achieved using a laser-induced fluorescence microscope. The HETP of this chip was 3∼4μm for fluorescence samples, and a separation coefficient of 2.2 was realized. The proposed fabrication method is very simple and easy, and has given separation and detection results for fluorescein derivatives.

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© 2000 The Japan Society for Analytical Chemistry
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