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Origin of Trace Organic Contaminants Adsorbed on the Surface of Silicon Wafers in a Manufacturing Line

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Authors and Affiliations

  1. Advanced Analysis Center, Korea Institute of Science and Technology, P. O. Box 131, Cheongryangri, Seoul, 130-650, Korea

    Hyun-Mee Park, Young-Man Kim, Chan Seong Cheong, Jae-Chun Ryu & Kang-Bong Lee

  2. Department of Chemistry, Yonsei University, Seodaimunku Sincheondong 134, Seoul, 120-749, Korea

    Dai Woon Lee

Authors
  1. Hyun-Mee Park
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  2. Young-Man Kim
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  3. Chan Seong Cheong
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  4. Jae-Chun Ryu
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  5. Dai Woon Lee
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  6. Kang-Bong Lee
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Correspondence to Kang-Bong Lee.

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Park, HM., Kim, YM., Cheong, C.S. et al. Origin of Trace Organic Contaminants Adsorbed on the Surface of Silicon Wafers in a Manufacturing Line. ANAL. SCI. 18, 477–479 (2002). https://doi.org/10.2116/analsci.18.477

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  • DOI: https://doi.org/10.2116/analsci.18.477

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