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Study of the Transverse Piezoelectric Coefficient of Pb(Zr,Ti)O3 Thin Films as a Function of Texture and Composition

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Abstract

The effective transverse piezoelectric coefficient was measured on 1 μm thick sol-gel processed Pb(Zr,Ti)O3 (PZT) thin films as a function of texture and composition. Optimal values were obtained with PZT films of {100} texture near the morphotropic phase boundary (53/47). The best value amounted to -12 C/m2

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Authors and Affiliations

  1. Ceramics Laboratory, Materials Department, EPFL Swiss Federal Institute of Technology, CH-1015, Lausanne, Switzerland

    A. Seifert, N. Ledermann, S. Hiboux & P. Muralt

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  1. A. Seifert
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  2. N. Ledermann
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  3. S. Hiboux
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  4. P. Muralt
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Seifert, A., Ledermann, N., Hiboux, S. et al. Study of the Transverse Piezoelectric Coefficient of Pb(Zr,Ti)O3 Thin Films as a Function of Texture and Composition. MRS Online Proceedings Library 596, 535–540 (1999). https://doi.org/10.1557/PROC-596-535

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  • DOI: https://doi.org/10.1557/PROC-596-535

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