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Crystal Structure and Texture Effects on Piezoelectric and Dielectric Properties of PZT Thin Films

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Abstract

A systematic investigation of the piezoelectric and dielectric properties of Pb(Zr1-xTix,)O3 (PZT) thin films fabricated by chemical solution deposition was carried out for rhombohedral (x= 0.40), tetragonal (x=0.55) and morphotropic (x=0.47) composition. Each composition was grown with three different crystallographic orientations (textures): “random”, (111) and (100). Nonlinearity (field dependence) of d33 piezoelectric coefficient and dielectric permittivity of the films was studied in detail under subswitching conditions to reveal domain-wall related contributions to the properties. After analyzing for each texture and composition the domain-wall structure, contributions due to domain-wall displacements, and effects of film clamping by the substrate a consistent interpretation of the electro-mechanical properties and nonlinear behavior was proposed. The (100) oriented rhombohedral films show the largest piezoelectric coefficient (intrinsic effect) but limited nonlinearity (domain-wall structure effect) and should therefore be considered as potential candidates for piezoelectric devices.

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References

  1. S. Hiboux, P. Muralt, and T. Maeder, J. Mat. Res. 14, 4307–4318 (1999).

    Article  CAS  Google Scholar 

  2. D. V. Taylor and D. Damjanovic, Appl. Phys. Lett. 73, 2045–2047 (1998).

    Article  CAS  Google Scholar 

  3. D. V. Taylor, D. Damjanovic, and N. Setter, Ferroelectrics 224, 299–306 (1999).

    Article  Google Scholar 

  4. J. F. Shepard, S. Trolier-McKinstry, M. A. Hendrickson, and R. Zeto, Proceedings of the 10th ISAF,Rutgers U., East Brunswick, NJ., 1996 (IEEE Service Center, Piscataway, NJ, USA), p. 161–165.

    Google Scholar 

  5. D. V. Taylor, K. G. Brooks, A. L. Kholkin, D. Damjanovic, and N. Setter, in ELECTROCERAMICS V, International conference on electroceramics and applications; Vol. 1, edited by J. L. Baptista, J. A. Labrincha, and P. M. Vilarinho (1996), p. 341–344.

    Google Scholar 

  6. D. V. Taylor, Ph. D. Thesis, No. 1949, Swiss Federal Institute of Technology- EPFL, 1999.

  7. P. Muralt, T. Maeder, L. Sagalowicz, S. Hiboux, S. Scalese, D. Naumovic, N. Agostino, Xantopoulos, H. J. Mathieu, L. Patthey, and E. L. Bullock, J. Appl. Phys. 83, 3835–3841 (1998).

    Article  CAS  Google Scholar 

  8. G. B. Harris, Phil. Mag. 43, 113–123 (1952).

    Article  Google Scholar 

  9. D. Damjanovic and M. Demartin, J. Phys.: Condens. Matter 9, 4943–4953 (1997).

    CAS  Google Scholar 

  10. X. L. Zhang, Z. X. Chen, L. E. Cross, and W. A. Schulze, J. Mater. Sci. 18, 968–972 (1983).

    Article  CAS  Google Scholar 

  11. K. Lefki and G. J. M. Dormans, J. Appl. Phys. 76, 1764–1767 (1994).

    Article  Google Scholar 

  12. X. Du, U. Belegundu, and K. Uchino, Jpn. J. Appl. Phys. 36, 5580–5587 (1997).

    Article  CAS  Google Scholar 

  13. X.-H. Du, J. Zheng, U. Belegundu, and K. Uchino, Appl. Phys. Lett. 72, 2421–2423 (1998).

    Article  CAS  Google Scholar 

  14. M. J. Haun, E. Furman, S. J. Jang, and L. E. Cross, Ferroelectrics 99, 63–86 (1989).

    Article  CAS  Google Scholar 

Download references

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Authors and Affiliations

  1. Ceramics Laboratory, Materials Department, Swiss Federal Institute of Technology - EPFL, 1015 Lausanne, Switzerland

    D. Damjanovic, D. V. Taylor & N. Setter

Authors
  1. D. Damjanovic
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  2. D. V. Taylor
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  3. N. Setter
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Correspondence to D. Damjanovic.

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Damjanovic, D., Taylor, D.V. & Setter, N. Crystal Structure and Texture Effects on Piezoelectric and Dielectric Properties of PZT Thin Films. MRS Online Proceedings Library 596, 529–534 (1999). https://doi.org/10.1557/PROC-596-529

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