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A Model for Estimating the Stress Induced During Oxidation of Sharp Silicon Structures

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Morgan, C.J., Humphreys, C.J. A Model for Estimating the Stress Induced During Oxidation of Sharp Silicon Structures. MRS Online Proceedings Library 389, 191–196 (1995). https://doi.org/10.1557/PROC-389-191

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  • DOI: https://doi.org/10.1557/PROC-389-191

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