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Sputtering of Lead-Based Ferroelectrics

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Abstract

PbTiO3(PT), Pb1−xLaxTi1−x/4O3(PLT) and PbZrxTi1−xO3(PZT) thin films were prepared by rf magnetron sputtering. It was found that the thin films have remarkably large pyroelectric effect and high figures of merit for infrared sensors without poling treatment. High performance pyroelectric infrared sensors (single element and linear array) were fabricated by using the PLT(x=0.1) thin films with the new structures and the device process. This type of sensor is carried on the air conditioner to detect a thermal environment. The PZT thin films with x=0.9 showed a large remanent polarization of 46μC/cm3 and small coercive force of 28kV/cm. In addition, good endurance behavior (no degradation of Pr after 1011 cycles) was observed. Recent activities of ferroelectric thin film research in Japan is also reported.

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Acknowledgments

The authors would like to thank Mr. Yoshihiro Daito and Professor Yoshichika Bando of Kyoto University for taking fine ТЕМ photographs.

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Authors and Affiliations

  1. Central Research Laboratories, Matsushita Electric Industrial Co. Ltd., Yakumonakamachi, Moriguchi, Osaka, 570, Japan

    K. Iijima, N. Nagao, T. Takeuchi, I. Ueda, Y. Tomita & R. Takayama

  2. Materials and Devices Research Laboratory, Matsushita Electric Industrial Co. Ltd., Kadoma, Osaka, 570, Japan

    Y. Tomita & R. Takayama

Authors
  1. K. Iijima
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  2. N. Nagao
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  3. T. Takeuchi
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  4. I. Ueda
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  5. Y. Tomita
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  6. R. Takayama
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Iijima, K., Nagao, N., Takeuchi, T. et al. Sputtering of Lead-Based Ferroelectrics. MRS Online Proceedings Library 310, 455–465 (1993). https://doi.org/10.1557/PROC-310-455

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  • DOI: https://doi.org/10.1557/PROC-310-455

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