Abstract
We report observations of interfacial structure and consequences for layer synthesis modes in mesotaxial Si/CoSi2/Si structures, as deduced from high resolution transmission electron microscopy (HRTEM). It is argued that relative crystal misalignments arising from the lattice parameter mismatch between the Si and CoSi2 may render classic rigid shift measurements of interfacial structure inaccurate. An alternative method for determining interfacial structure at three-dimensional precipitates by analyzing crystal stacking sequences is demonstrated.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
A.E. White, K.T. Short, R.C. Dynes, J.P. Garno and J.M. Gibson, Appl. Phys. Lett. 50, 95 (1987)
A.E. White, K.T. Short, R.C. Dynes, J.M. Gibson and R. Hull, Mat. Res. Soc. Proc. 107, 3 (1988)
C.W.T. Bulle-Lieuwma, A.H. van Ommen and L.J. van Ijzendoorn, Appl. Phys. Lett. 54, 244 (1989)
A.H. van Ommen, J.J.M. Ottenheim, A.M.L. Theunissen and A.G. Mouwen, Appl. Phys. Lett. 53, 669 (1988)
J.C. Barbour, S.T. Picreaux and B.L. Doyle, Mat. Res. Soc. Proc. 107, 269 (1988)
Y.F. Hsieh, R. Hull, A.E. White and K.T. Short, to be published.
See, for example, R.T. Tung, A.F.J. Levi, F. Schrey and M. Anzlowar in “Evaluation of Advanced Semiconductor Materials by Electron Microscopy”, ed. D. Cherns, NATO ASI Series B: Physics Vol. 203, p.167 (Plenum Press, 1989)
Data Translation Inc., 100 Locke Drive, Marlboro, MA 07152-1192
D. Cherns, G.R. Anstis and J.L. Hutchison, Phil. Mag. A46, 849 (1982)
D.R. Hamann, Phys. Rev. Lett. 60, 313 (1988)
D. Cherns, C.J.D. Hetherington and C.J. Humphreys, Phil. Mag. A49, 165 (1984)
R.T. Tung and J.M. Gibson, J. Vac. Sci. Tech. A3, 987 (1985)
A. Catana, P.E. Schmid, S. Rieubland, F. Levy and P. Stadelmann, J. Phys. Condens. Matter. 1, 3999 (1989)
C.W.T. Bulle-Lieuwma, A.F. de Jong, A.H. van Ommen, J.F. van der Veen and J. Vrijmoeth, Appl. Phys. Lett. 55, 648 (1989)
M.M.J. Treacy, J.M. Gibson and A. Howie, Phil. Mag. A51, 389 (1985)
J.M. Gibson in “Surface and Interface Characterization by Electron Optical Methods”, Nato ISI Series B: Physics Vol. 191 (ed. A. Howie and U. Valdre), p. 55 (Plenum Press, New York, 1988).
Acknowledgments
We would like to acknowledge D. Bahnck for assistance in TEM sample preparation, D.J. Eaglesham and D. Loretto for very useful discussions and J.M. Gibson and A. Ourmazd for access to JEOL 4000EX electron microscopes.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Hull, R., Hsieh, Y., Short, K. et al. Interface Structure and Layer Synthesis Modes in Mesotaxial Si/Cosi2/Si Structures. MRS Online Proceedings Library 183, 91–104 (1990). https://doi.org/10.1557/PROC-183-91
Published:
Issue Date:
DOI: https://doi.org/10.1557/PROC-183-91