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Quantitative X-Ray Diffraction From Superlattices

  • Quantitative Analysis of Thin Films
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Conclusion

X-ray structural refinement provides a powerful nondestructive quantitative technique for determining the atomic structure and disorder of superlattices. Structural parameters including the lattice strains, interdiffusion, step disorder, and atomic level disorder can be determined. If combined with transmission or grazing incidence diffraction to determine in-plane lattice constants and low-angle scattering—which is more sensitive to the morphology of the interface over long lateral-length scales—a complete structural determination of the superlattice structure is possible. Computer programs, instruction manuals, and relevant references can be obtained by writing directly to two of the authors (IKS, YB) of this paper.

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Authors
  1. Eric E. Fullerton
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  2. Ivan K. Schuller
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  3. Y. Bruynseraede
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Fullerton, E.E., Schuller, I.K. & Bruynseraede, Y. Quantitative X-Ray Diffraction From Superlattices. MRS Bulletin 17, 33–38 (1992). https://doi.org/10.1557/S0883769400046935

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