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Influence of Gas Atmosphere on the Plasticity of Metal Thin Films

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Abstract

Stresses in thin films are routinely measured by the so-called substrate curvature technique. These experiments are usually carried out in air or under a protective gas atmosphere. In this contribution we describe a new set-up capable of performing substrate curvature measurements under ultra-high vacuum conditions. The advantages are the absence of possible artifacts due to gas/film interactions, better control of gas composition, and the possibility to measure chemical effects on mechanical properties in a controlled way. We present first results that indicate an unexpected sensitivity even of polycrystalline Cu films to the gas environment.

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Authors and Affiliations

  1. Max-Planck Institute for Metals Research, Stuttgart, Germany

    T. Wübben & E. Arzt

  2. Institut für Metallkunde, University of Stuttgart, Stuttgart, Germany

    E. Arzt

  3. now at Erich Schmid Institut für Materialwissenschaft, Österreichische Akademie der Wissenschaften and Department für Materialphysik, Montanuniversität Leoben, Leoben, Austria

    G. Dehm

Authors
  1. T. Wübben
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  2. G. Dehm
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  3. E. Arzt
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Wübben, T., Dehm, G. & Arzt, E. Influence of Gas Atmosphere on the Plasticity of Metal Thin Films. MRS Online Proceedings Library 875, 65 (2005). https://doi.org/10.1557/PROC-875-O6.5

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  • DOI: https://doi.org/10.1557/PROC-875-O6.5

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