Abstract
The thermodynamic calculations of chemical equilibrium compositions of various species were performed for silane-hydrogen system at different temperatures [500–6000K], pressures [0.01–10 Torr], and mixing ratios [various silane fractions]. The effect of dopant impurities such as diborane and phosphine on equilibrium concentration profiles of various gaseous, tonic, and condensed species was also investigated. These data will be very useful in understanding the deposition chemistry of silane chemical systems and will be a valuable aid in optimization studies.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
J. I. Pankove, Editor, Semiconductors and semimetals, Vol. 21, Part D, Academic Press, Inc., 1984
J. M. Mexmain, D. Morvan, E. Bourdin, J. Amourous, and P. Fauchais, Plasma Chem. and Plasma. Processing 3, 393 (1983)
S. Gordon, and B. J. McBride, “Computer Program of Calculations of Complex Chemical Equilibrium Compositions, Rocket Performance, Incident and Reflected Shocks, and Chapman-Jouquet Detonations,” NASA SP-273, 1973
B. J. McBride, and S. Gordon, “Fortran IV Program for Calculation of Thermodynamic Data,” NASA TN-D-4097, 1967
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Patel, R.I. Thermodynamic Study of Silane-hydrogen Chemical System. MRS Online Proceedings Library 49, 3–8 (1985). https://doi.org/10.1557/PROC-49-3
Published:
Issue Date:
DOI: https://doi.org/10.1557/PROC-49-3