Abstract
The microstructure of films is a result of the interplay of nucleation and growth processes which occur during deposition. A columnar structure is characteristic of films irrespective of the material or the deposition process. The length scale of the microstructure depends systematically on the atomic mobility during growth.
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Acknowledgments
We are indebted to Drs. C.R.M. Grovenor, J.M.E. Harper, H.T.G. Hentzell and K. Sheppard for invaluable discussions concerning the material in this overview.
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Smith, D.A., Ibrahim, A. Zone Descriptions of Film Structure-A Rationale. MRS Online Proceedings Library 317, 401–412 (1993). https://doi.org/10.1557/PROC-317-401
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DOI: https://doi.org/10.1557/PROC-317-401