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X-Ray Reflectometry of Single- and Multi-Layer Thin Films

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Abstract

This paper describes the instrumentation and technique for the routine characterization of thin Films, multi-layers and substrates by grazing incidence X-ray reflectometry with a rotating anode and CuK6h1, line source. Ge 220 channel monochromators with two reflections per channel were used with one CM placed before and the other after the specimen. In many applications the second CM could be replaced with a narrow receiving slit. The specimen holder was designed to make fine translations of the specimen for alignment, a base was designed to permit precise positioning of the diffractometer, and a high-speed Rigaku scintillation counter was used. The alignment and calibration are described and some typical data given to illustrate the capability of the method.

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References

  1. H. Kiessig, Ann. Physik (Leipzig) 10, 769 (1931).

    Article  CAS  Google Scholar 

  2. T. P. Russell, Mater. Sci. Repts. 5, 171 (1990).

    Article  CAS  Google Scholar 

  3. A. H. Weiss, M. Deutsch, A. Breslau, B. M. Ocko and P. S. Pershan, Rev. Sci. Inst. 57, 2544 (1986).

    Article  Google Scholar 

  4. W. Parrish, M. Hart and T. C. Huang, J. Appl. Cryst. 19, 92 (1986).

    Article  CAS  Google Scholar 

  5. W. Parrish, Rev. Sci. Inst. 38, 1779 (1967).

    Article  CAS  Google Scholar 

  6. B. D. Hermsmeier, R. F. C. Farrow, C. H. Lee, E. E. Marinero, C. J. Lin, and R. F. Marks, accepted for publication in J. Appl. Phy. 69, 1991.

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Acknowledgements

The authors are indebted to the following IBM colleagues who prepared the specimens and discussed the properties with us: Robin Farrow, Charles Lee and Harris Notarys.

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Authors and Affiliations

  1. IBM Research Division, Almaden Research Center, San Jose, California, 95120-6099, USA

    W. Parrish, C. Erickson & T. C. Huang

  2. Departmcnt of Physics, The University, Manchester, M13 9PL, UK

    M. Hart

  3. C.E.N.G. 85X, 38041, Grenoble Cedex, France

    B. Gilles

  4. Ceramics Research Laboratory, Nagoya Institute of Technology, Tajimi, Gifu, Japan

    H. Toraya

Authors
  1. W. Parrish
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  2. C. Erickson
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  3. T. C. Huang
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  4. M. Hart
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  5. B. Gilles
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  6. H. Toraya
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Parrish, W., Erickson, C., Huang, T.C. et al. X-Ray Reflectometry of Single- and Multi-Layer Thin Films. MRS Online Proceedings Library 208, 327–337 (1990). https://doi.org/10.1557/PROC-208-327

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  • DOI: https://doi.org/10.1557/PROC-208-327

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