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Morphology and gas barrier properties of thin SiOxcoatings on polycarbonate: Correlations with plasma-enhanced chemical vapor deposition conditions

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Abstract

Plasma-enhanced chemical vapor deposition of SiOx coatings on thermoplastics provides a viable route for production of transparent composite materials with high fracture toughness and high gas barrier properties, which are important considerations in the food packaging and biomedical device industries. By examining several series of systematically varied SiOx/polycarbonate composites, we have identified design correlations between coating characteristics (thickness, density, surface roughness, and O2 transmission) and deposition conditions (time, power, pressure, and flow rates). Of particular interest is the observation that the thermal activation energy for O2 permeation through these composites increases (by up to 17 kJ/mol) as their barrier efficacy increases.

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References

  1. T. Krug, R. Ludwig, and G. Steiniger, SVC 36th Annu. Tech. Conf. Proc., 302 (1993).

  2. D. Chahroudi, SVC 34th Annu. Tech. Conf. Proc., 130 (1991).

  3. D. Chahroudi, SVC 31st Annu. Tech. Conf. Proc., 145 (1988).

  4. D. Chahroudi, SVC 32nd Annu. Tech. Conf. Proc., 29 (1989).

  5. T.G. Krug, SVC 33rd Annu. Tech. Conf. Proc., 163 (1990).

  6. E.H.H. Jamieson and A.H. Windle, J. Mater. Sci. 18, 64 (1983).

    Article  CAS  Google Scholar 

  7. G. Menges, W. Michaeli, P. Plein, R. Ludwig, and T. Brinkman, Coatings 22, 2 (1989).

    CAS  Google Scholar 

  8. J. Keiser and M. Neusch, Thin Solid Films 118, 203 (1984).

    Article  Google Scholar 

  9. T.A. Shepard, C.R. DelSorbo, R.M. Louth, J.L. Walborn, D.A. Norman, N.G. Harvey, and R.J. Spontak, J. Polym. Sci. B: Polym. Phys. 35, 2617 (1997).

    Article  CAS  Google Scholar 

  10. T. Bauer, R. Thomann, and R. Mülhaupt, Macromolecules 31, 7651 (1998).

    Article  CAS  Google Scholar 

  11. P.V. Mercea and M. Bartan, J. Membrane Sci. 59, 353 (1991).

    Article  CAS  Google Scholar 

  12. J.T. Felts, SVC 33rd Annu. Tech. Conf. Proc., 184 (1990).

  13. F. Jansen, AVS Short Course Program, 43rd National Symposium, Philadelphia, PA, 1996.

  14. J.G. Eden, in Thin Film Processes II, edited by J. Vossen and W. Kern (Academic Press, Boston, 1991), p. 443.

    Chapter  Google Scholar 

  15. R.P.H. Chang, S. Darack, E. Lane, C.C. Chang, D. Allara, and E. Ong, J. Vac. Sci. Technol., B 1, 935 (1983).

    Article  Google Scholar 

  16. J. Batey and E. Tierney, J. Appl. Phys. 60, 3136 (1986).

    Article  CAS  Google Scholar 

  17. J.T. Felts and A.D. Grubb, J. Vac. Sci. Technol., A 10, 1675 (1992).

    Article  CAS  Google Scholar 

  18. R.J. Nelson, SVC 35th Annu. Tech. Conf. Proc., 75 (1992).

  19. R.W. Knoll and J.A. Theil, SVC 38th Annu. Tech. Conf. Proc., 425 (1995).

  20. A.G. Erlat, R.J. Spontak, R.J. Clark, T.C. Robinson, P.D. Haaland, Y. Tropsha, N.G. Harvey, and E.A. Vogler, J. Phys. Chem. B 103, 6047 (1999).

    Article  CAS  Google Scholar 

  21. B.D. Montgomery, U.S. Patent No. 5 766 362 (16 June 1998).

  22. S.N. Magonov, Y. Elings, and M.H. Whangbo, Surface Science 375, L385 (1997).

    Article  CAS  Google Scholar 

  23. J.T. Felts, SVC 34th Annu. Tech. Conf. Proc., 99 (1991).

  24. B-C. Wang, A.G. Erlat, R.J. Spontak, Y.G. Tropsha, E.A. Vogler, M. Dalvie, and K. Mar, ACS Polymer Preprints 38, 1018 (1997).

    CAS  Google Scholar 

  25. J.H. Lee, D.S. Kim, and Y.H. Lee, J. Electrochem. Soc. 143, 1442 (1996).

    Google Scholar 

  26. M. Born and E. Wolf, Principles of Optics (Pergamon Press, Oxford, England, 1965), p. 83.

    Google Scholar 

  27. B-C. Wang, Y. Tropsha, D.B. Montgomery, E.A. Vogler, and R.J. Spontak, J. Mater. Sci. Lett. 18, 311 (1999).

    Article  Google Scholar 

  28. L.M. Costello and W.J. Koros, J. Polym. Sci. B: Polym. Phys. 32, 701 (1994).

    Article  CAS  Google Scholar 

  29. H. Yasuda, Plasma Polymerization (Academic Press, New York, 1985), p. 277.

    Book  Google Scholar 

  30. S. Sahli, Y. Segui, S. Ramdani, and Z. Takkouk, Thin Solid Films 250, 206 (1994).

    Article  CAS  Google Scholar 

  31. J.A. Theil, J.G. Brace, and R.W. Knoll, J. Vac. Sci. Tech. A 12, 1365 (1994).

    Article  CAS  Google Scholar 

  32. T.V. Herrak and D.J. Thomson, J. Appl. Phys. 67, 6347 (1990).

    Article  Google Scholar 

  33. M. Benmalek and H.M. Dunlop, Surf. Coat. Tech. 76/77, 821 (1995).

    Article  Google Scholar 

  34. R.W. Philips, T. Markantes, and C. LeGallee, SVC 36th Annu. Tech. Conf. Proc., 293 (1993).

  35. K.H.A. Bogart, N.F. Dalleska, G.R. Bogart, and E.R. Fisher, J. Vac. Sci. Tech. A 13, 476 (1995).

    Article  CAS  Google Scholar 

  36. D. Korzec, D. Theirich, F. Werner, K. Traub, and J. Engemann, J. Surf. Coat. Tech. 74/75, 67 (1995).

    Article  Google Scholar 

  37. D. Korzec, F. Werner, A. Brockhaus, J. Engemann, T.P. Schneider, and R.J. Nemanich, J. Vac. Sci. Tech. A 13, 2074 (1995).

    Article  CAS  Google Scholar 

  38. Engineering Plastics, Engineered Materials Handbook Vol. 2 (ASM International, OH, 1988), p. 151.

  39. Permeability and Other Film Properties of Plastics and Elastomers (Plastics Design Library, New York, 1995), p. 113.

  40. G. Garcia-Ayuso, L. Vazquez, and J.M. Martinez-Duart, Surf. Coat. Tech. 80, 203 (1996).

    Article  CAS  Google Scholar 

  41. C.P. Barker, K.H. Kochem, K.M. Revell, R.S.A. Kelly, and J.P.S. Badyal, Thin Solid Films 46, 259 (1995).

    Google Scholar 

  42. W.G. Perkins and D.R. Begeal, J. Chem. Phys. 54, 1683 (1971).

    Article  CAS  Google Scholar 

  43. F.J. Norton, J. Amer. Ceramic Soc. 36, 90 (1953).

    Article  CAS  Google Scholar 

  44. V. Stannet, in Diffusion in Polymers, edited by J. Crank (Academic Press, New York, 1968), p. 41.

    Google Scholar 

  45. A.P. Roberts, B.M. Henry, A.P. Sutton, C.R.M. Grovenor, G.A.D. Briggs, T. Miyamoto, M. Kano, Y. Tsukahara, and M. Yanaka (unpublished).

  46. Y.G. Tropsha and N.G. Harvey, J. Phys. Chem. B 101, 2239 (1997).

    Article  Google Scholar 

  47. M. Yanaka, Y. Takada, Y. Tsukahara, T. Miyamoto, B.M. Henry, A.P. Roberts, C.R.M. Grovenor, A.P. Sutton, G.A.D. Briggs, and R. Chater, Thin Solid Films (in press).

  48. A.B. Shelekhin, A.G. Dixon, and Y.H. Ma, AIChE J. 41, 58 (1995).

    Article  CAS  Google Scholar 

  49. F.J. Norton, Nature 191, 701 (1961).

    Article  CAS  Google Scholar 

  50. R.H. Doremus, Glass Science (John Wiley & Sons, London, England, 1973), p. 213.

    Google Scholar 

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Authors and Affiliations

  1. Departments of Materials Science & Engineering and Chemical Engineering, North Carolina State University, Raleigh, North Carolina, 27695, USA

    Ahmet G. Erlat, Bo-Chy Wang & Richard J. Spontak

  2. Polymer Science & Technology Department, Becton Dickinson Technologies, Research Triangle Park, North Carolina, 27709, USA

    Yelena Tropsha, Kevin D. Mar, David B. Montgomery & Erwin A. Vogler

Authors
  1. Ahmet G. Erlat
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  2. Bo-Chy Wang
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  3. Richard J. Spontak
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  4. Yelena Tropsha
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  5. Kevin D. Mar
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  6. David B. Montgomery
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  7. Erwin A. Vogler
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Correspondence to Richard J. Spontak.

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Erlat, A.G., Wang, BC., Spontak, R.J. et al. Morphology and gas barrier properties of thin SiOxcoatings on polycarbonate: Correlations with plasma-enhanced chemical vapor deposition conditions. Journal of Materials Research 15, 704–717 (2000). https://doi.org/10.1557/JMR.2000.0103

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  • DOI: https://doi.org/10.1557/JMR.2000.0103

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