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Epitaxial Growth of Patterned SrBi2Ta2O9 Lines by Channel Stamping

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Abstract

Patterned epitaxial SrBi2Ta2O9 (SBT) lines with (00l) out-of-plane orientation were grown on a (001) SrTiO3 substrate by the novel “channel stamping” method. Parallel channels in a poly(dimethylsiloxane) stamp were filled with a metalorganic precursor solution by spin coating. After solvent evaporation, the solid precursor within the channels was transferred to the substrate by stamping. Stamped precursor lines were pyrolyzed at 350 °C/1 h and then heated to 850 °C/1 h. It was shown by x-ray diffraction and scanning electron microscopy that patterned SBT lines were epitaxial, had a smooth surface with c-axis out-of-plane orientation, and a single in-plane orientation.

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Kim, J.H., Lange, F.F. & Cheon, CI. Epitaxial Growth of Patterned SrBi2Ta2O9 Lines by Channel Stamping. Journal of Materials Research 14, 1194–1196 (1999). https://doi.org/10.1557/JMR.1999.0161

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  • DOI: https://doi.org/10.1557/JMR.1999.0161

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