1996 Volume 116 Issue 4 Pages 149-155
A theoretical expression to calculate the strain on a circular diaphragm fixed at the circumference and the center has been derived to predict the sensitivity of a micro-diaphragm pressure sensor. Young's modulus and internal stress of several thin films used for the diaphragm of the sensor and their layered structures were measured. Using the measured data, it was confirmed that Young's modulus and internal stress for layered thin film structure can be calculated by a composite law. Two sensors were fabricated to verify the validity of the derived equations, and their sensitivity was measured and calculated. The measured and calculated sensitivities showed good agreement.
IEEJ Transactions on Industry Applications
IEEJ Transactions on Electronics, Information and Systems
IEEJ Transactions on Power and Energy
IEEJ Transactions on Fundamentals and Materials
The Journal of The Institute of Electrical Engineers of Japan
The transactions of the Institute of Electrical Engineers of Japan.C
The transactions of the Institute of Electrical Engineers of Japan.B
The transactions of the Institute of Electrical Engineers of Japan.A
The Journal of the Institute of Electrical Engineers of Japan