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Conferences > CLEO_SI > 2019 > STh1F > STh1F.2

Trace-gas Spectroscopy of Methane using a Monolithically Integrated Silicon Photonic Chip Sensor

Eric J. Zhang, Yves Martin, Jason S. Orcutt, Chi Xiong, Martin Glodde, Tymon Barwicz, Laurent Schares, Elizabeth A. Duch, Nathan Marchack, Chu C. Teng, Gerard Wysocki, and William M. J. Green

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Abstract

We present a monolithically integrated photonic sensor incorporating an on-chip III-V laser, detector, sealed reference cell, and sensing waveguide capable of near-infrared absorption spectroscopy of methane near λ = 1651 nm. Sub-100 ppmv∙Hz-1/2 sensitivities are demonstrated.

© 2019 The Author(s)

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