年次大会
Online ISSN : 2424-2667
ISSN-L : 2424-2667
2016
セッションID: S1330203
会議情報

透明マイクロパターンパッドを用いた CMP 中の微粒子観察に関する研究
(落射型顕微鏡による微粒子観察の検討)
鬼木 喬玄鈴木 恵友カチョーンルンルアン パナート
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会議録・要旨集 フリー

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抄録

Transparency micro-patterned pad is used to observe fine particles by an epi-illumination microscope. The material of transparency micro-patterned pad is resin which has almost same as the refractive index of water. Therefore, it has characteristic that the micro pattern could disappear in the observation image by filling water. Epi-illumination microscope has illumination system and the detection system on the same side. In this study, we succeeded to observe the diamond particles with a diameter of 1μm on the glass substrate at 1000 frame/s in dark-field illumination. This results show that the fine particles could be observed simplicity, and also suggest the possibility that the fine particles observation on opaque substrate using the epi-illumination microscope.

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© 2016 一般社団法人 日本機械学会
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