Humidity Sensors: A Review of Materials and Mechanisms

We have reviewed humidity sensors based on various materials for both relative and absolute humidity, including ceramic, semiconducting, and polymer materials. In the majority of publications, there are few papers dealing with absolute humidity sensors, which have extensive applications in industry. We reviewed extensively absolute humidity sensors in this article, which is unique comparing with other reviews of humidity sensors. The electrical properties of humidity sensors such as sensitivity, response time, and stability have been described in details for various materials and a considerable part of the review is focused on the sensing mechanisms. In addition, preparation and characterization of sensing materials are also described. For absolute humidity sensors, mirror-based dew-point sensors and solid-state Al₂O₃ moisture sensors have been described. As the major problem in Al₂O₃ moisture sensors, long-term instability, has been solved, α-Al₂O₃ moisture sensors may have promising future in industry.