Abstract
We demonstrated ultrasensitive detection of ozone using single-walled carbon nanotube (SWNT) networks directly grown on a conventional sensor substrate. Ozone was detected down to the ppb level (∼6 ppb) at room-temperature operation with a fast response. Using an electrical breakdown technique, gas sensitivity was improved. This result clearly indicates that owing to its high sensitivity, simplicity in fabrication and compact size, an SWNT sensor provides a feasible route to ultrasensitive ozone detection surpassing existing methods.