Absolute Measurement of Surface Potential and Discharge Power Distributions for Piezoelectric Transformer-Based Plasma Reactor

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Published 22 September 2005 Copyright (c) 2005 The Japan Society of Applied Physics
, , Citation Kenji Teranishi and Haruo Itoh 2005 Jpn. J. Appl. Phys. 44 7083 DOI 10.1143/JJAP.44.7083

1347-4065/44/9S/7083

Abstract

A new method for absolute measurement of surface potential distributions on a Rosen-type piezoelectric transformer (PT) was investigated using a sensing electrode proposed in this study. The sensing electrode consists of a dielectric layer having striped back electrodes arrayed in the longitudinal direction of the PT, which is basically similar to the electrode for generating a dielectric barrier discharge (DBD). An equivalent circuit was defined for each striped electrode and a constant in the circuit necessary for the estimations of the absolute surface potential distributions was determined experimentally. The absolute measurements of the surface potential distributions of the PT were performed at (1/2)λ mode vibration both with and without a potential divider (PD) connected to the secondary terminal. Surface potential distribution without the PD connected, i.e., the unloaded condition of the PT, is in good agreement with the theoretical curve of the surface potential distribution. Moreover, the surface potential distribution while the DBD appears and the discharge power distribution of the DBD generated by the PT was also determined at absolute values using the same electrode configurations.

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10.1143/JJAP.44.7083