Abstract
The three-dimensional (3D) nanostructure fabrication technology using focused ion beam chemical vapor deposition (FIB-CVD) is very effective for highly efficient 3D nanomechanical device fabrication. We can fabricate 3D nanostructure easily and freely with this fabrication technology using FIB-CVD. Here, we demonstrate the fabrication of various 3-D nano-electrostatic actuators and manipulators on a glass capillary by 30 keV Ga+ focused-ion-beam-assisted deposition with phenanthrene vapor as a precursor, and the operation of these actuators and manipulators by applying voltage onto a Au-coated glass capillary under an optical microscope is shown. Furthermore, the structural characteristics and functionalities of them are described in this paper.