Brought to you by:

Preparation and Properties of (Ba, Sr)TiO3 Thin Films by RF Magnetron Sputtering

and

Copyright (c) 1993 The Japan Society of Applied Physics
, , Citation Noboru Ichinose Noboru Ichinose and Takashi Ogiwara Takashi Ogiwara 1993 Jpn. J. Appl. Phys. 32 4115 DOI 10.1143/JJAP.32.4115

Download Article PDF

Article metrics

45 Total downloads

Share this article

Author affiliations

1 Department of Materials Science and Engineering, School of Science and Engineering, Waseda University, 3-4-1 Ohkubo, Shinjuku-ku, Tokyo, 169

Dates

  1. Received 17 May 1993
  2. Accepted 17 July 1993

Buy this article in print

Journal RSS
Sign up for new issue notifications
1347-4065/32/9S/4115

Abstract

This paper describes the properties of (Ba0.5Sr0.5)TiO3 thin films prepared on Pd(100)/MgO(100) substrate using the rf magnetron sputtering technique. Perovskite-type thin films were prepared at a gas pressure of 7 mTorr, and the crystal orientations of thin films changed depending on the substrate temperature. The dielectric constant increased with increasing substrate temperature, and the maximum value ∼300 was obtained at 550°C.

Export citation and abstract BibTeX RIS

Previous article in issue
Next article in issue
Please wait… references are loading.
10.1143/JJAP.32.4115