Abstract
Irradiation using oxygen radicals O* and ions O2+ from an active ECR oxygen plasma source has been applied to the preparation of Y-Ba-Cu-O superconducting films. Irradiation by oxygen radicals O* was found to drastically improve the films characteristics over those prepared in the presence of oxygen ions O2+. This effect is considered to be as a result of enhanced and damage-less surface interactions due to oxygen radicals.