The Irradiation Effects of an Oxygen Radical Beam on the Preparation of Superconducting Thin Films

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Copyright (c) 1991 The Japan Society of Applied Physics
, , Citation Patrick O'keeffe et al 1991 Jpn. J. Appl. Phys. 30 L834 DOI 10.1143/JJAP.30.L834

1347-4065/30/5A/L834

Abstract

Irradiation using oxygen radicals O* and ions O2+ from an active ECR oxygen plasma source has been applied to the preparation of Y-Ba-Cu-O superconducting films. Irradiation by oxygen radicals O* was found to drastically improve the films characteristics over those prepared in the presence of oxygen ions O2+. This effect is considered to be as a result of enhanced and damage-less surface interactions due to oxygen radicals.

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10.1143/JJAP.30.L834