Ge Atomic Layer Epitaxy by Use of Ar Ion Laser Heating
Yasuo Takahashi1, Yoshiteru Sese2 and Tsuneo Urisu1
Copyright (c) 1989 The Japan Society of Applied Physics
,
,
Citation Yasuo Takahashi et al 1989 Jpn. J. Appl. Phys. 28 2387
DOI 10.1143/JJAP.28.2387
Article metrics
40 Total downloads
Permissions
1347-4065/28/11R/2387