Ge Atomic Layer Epitaxy by Use of Ar Ion Laser Heating

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Copyright (c) 1989 The Japan Society of Applied Physics
, , Citation Yasuo Takahashi et al 1989 Jpn. J. Appl. Phys. 28 2387 DOI 10.1143/JJAP.28.2387

1347-4065/28/11R/2387

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