Adsorption of Oxygen SnOx Thin Film

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Copyright (c) 1989 The Japan Society of Applied Physics
, , Citation Ryōsuke Konishi et al 1989 Jpn. J. Appl. Phys. 28 1288 DOI 10.1143/JJAP.28.1288

1347-4065/28/7R/1288

Abstract

The change in electrical resistance and the surface potential of SnOx thin film by the adsorption of oxygen were observed. At an oxygen pressure of 6.7×10-4 Pa, both changes result in a decrease. At further adsorption, the change in the electrical resistance ascends abruptly at about 10-2 Pa. These changes can be explained by devising a model of band bending.

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10.1143/JJAP.28.1288