Abstract
Highly conducting and transparent thin films of undoped tin oxide (SnO2) are prepared on unheated substrates (≦90°C) by rf magnetron sputtering under an applied external dc magnetic field. The lowest resistivity obtained is 1.9×10-3 Ωcm. The SnO2 films with a sheet resistance below 200 Ω/sq and an average visible transmittance (between 400 and 700 nm) above 85%, and below 300 Ω/sq above 80% (including organic film substrate) can be obtained for the films deposited on glass substrates and organic film substrates, respectively.