Geographical Survey Institute started to utilize Interferometric SAR (InSAR) analysis with ALOS/PALSAR data for "Precise Ground Deformation Survey Project". The survey project is focused on earthquake, volcano, subsidence and landslide for crustal and ground deformation monitoring. For the purpose of the survey project we arranged for two essential factors, analysis system and data acquisition. As for the analysis system, GSI has been developing L band SAR data processing/analysis systems. Now the system is fully adapted with PALSAR data for regular survey works. For data acquisition, GSI has cooperated with JAXA for basic and urgent observation requests. As for the regular analysis, we will provide interferograms of volcanoes and subsidence areas with intervals of every few month to a year. Subsequently, we will extend analysis targets from specific areas toward a whole area of Japan for making a crustal and ground deformation map of the nation.