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Synthesis of aligned arrays of “Microropes” of silica nanowires by gas-jet electron beam plasma chemical vapor deposition method

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Abstract

For the first time, aligned arrays of bundles (“microropes”) of silica nanowires were synthesized from a monosilane-hydrogen mixture by gas-jet electron beam plasma chemical vapor deposition method. The synthesis was performed on single-crystal silicon substrates coated by micron-sized particles of stannic catalyst. A bundle (“microrope”) of silica nanowires each of which is about 15 nm in diameter grows from a catalyst particle. It seems that the synthesis proceeds by the vapor-liquid-solid mechanism, and several nanowires grow synchronously from the surface of one catalyst particle. The “microrope” growth rate was about 25 nm/s at a synthesis temperature of 400°C. A possible growth model was proposed to explain these results.

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Correspondence to S. Ya. Khmel.

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Original Russian Text © E.A. Baranov, A.O. Zamchiy, S.Ya. Khmel, 2013, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2013, Vol. 39, No. 22, pp. 88–94.

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Baranov, E.A., Zamchiy, A.O. & Khmel, S.Y. Synthesis of aligned arrays of “Microropes” of silica nanowires by gas-jet electron beam plasma chemical vapor deposition method. Tech. Phys. Lett. 39, 1023–1025 (2013). https://doi.org/10.1134/S1063785013110163

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  • DOI: https://doi.org/10.1134/S1063785013110163

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