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Atomic force microscopy modified for studying electric properties of thin films and crystals. Review

  • Surface. Thin Films
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Abstract

Probe force microscopy continues growing in popularity as a method for studying surfaces of solids and control over crystals and thin films that are grown on various scientific and industrial setups. New modifications of the method increase the possibilities for recording various characteristics of the objects studied. An important role here is played by “electrical” force microscopy, the various modifications and practical applications of which are considered below, as well as the results obtained by this method.

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References

  1. G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).

    Article  ADS  Google Scholar 

  2. Y. Martin and H. K. Wickramasinghe, Appl. Phys. Lett. 50, 1455 (1987).

    Article  ADS  Google Scholar 

  3. J. J. Séenz, N. Garcia, P. Grütter, et al., J. Appl. Phys. 62, 4293 (1987).

    Article  ADS  Google Scholar 

  4. A. Wadas, J. Magn. Magn. Mater. 71, 147 (1988).

    Article  ADS  Google Scholar 

  5. U. Hartmann, J. Appl. Phys. 64, 1561 (1988).

    Article  ADS  Google Scholar 

  6. J. Sáenz, N. Garcia, and J. C. Slonczewski, Appl. Phys. Lett. 53, 1449 (1988).

    Article  ADS  Google Scholar 

  7. M. Mansuripur, IEEE Trans. Magn. 22, 3467 (1989).

    Article  ADS  Google Scholar 

  8. Y. Martin, D. W. Abraham, and H. K. Wickramasinghe, Appl. Phys. Lett. 52, 1103 (1988).

    Article  ADS  Google Scholar 

  9. R. Erlandsson, G. M. McClelland, C. M. Mate, and S. Chiang, J. Vac. Sci. Technol. A 6, 266 (1988).

    Article  ADS  Google Scholar 

  10. J. E. Stern, B. D. Terris, H. J. Mamin, and D. Rugar, Appl. Phys. Lett. 53, 2717 (1988).

    Article  ADS  Google Scholar 

  11. C. Schönenberger and S. F. Alvarado, Rev. Sci. Instrum. 60, 3131 (1989).

    Article  ADS  Google Scholar 

  12. B. D. Terris, J. E. Stern, D. Rugar, and H. J. Mamin, Phys. Rev. B 63, 2669 (1989).

    ADS  Google Scholar 

  13. J. R. Matey and J. Blanc, J. Appl. Phys. 57, 1437 (1985).

    Article  ADS  Google Scholar 

  14. I. V. Yaminskii and A. M. Tishin, Usp. Khim. 68(3), 187 (1999).

    Google Scholar 

  15. S. Lányi, J. Török, and P. Řehůřek, Rev. Sci. Instrum. 65, 2258 (1994).

    Article  Google Scholar 

  16. C. D. Bugg and P. J. King, J. Phys. E: Sci. Instrum. 21, 147 (1988).

    Article  ADS  Google Scholar 

  17. J. L. de Jong and J. D. Reimer, Scan. Electron Microsc. 3, 933 (1986).

    Google Scholar 

  18. P. Muralt and D. W. Pohl, Appl. Phys. Lett. 48, 514 (1986).

    Article  ADS  Google Scholar 

  19. J. P. Pelz and R. H. Koch, Rev. Sci. Instrum. 60, 301 (1989).

    Article  ADS  Google Scholar 

  20. A. K. Henning, T. Hochwitz, J. Slinkman, et al., J. Appl. Phys. 77, 1888 (1995).

    Article  ADS  Google Scholar 

  21. U. Hartmann, Ultramicroscopy 42–44, 59 (1992).

    Article  Google Scholar 

  22. O. Teschke and E. F. de Souza, Appl. Phys. Lett. 74, 1755 (1999).

    Article  ADS  Google Scholar 

  23. Y. Martin, C. C. Williams, and H. K. Wickramasinghe, J. Appl. Phys. 61, 4723 (1987).

    Article  ADS  Google Scholar 

  24. H. W. Hao, A. M. Baró, and J. J. Sáenz, J. Vac. Sci. Technol. B 9, 1323 (1991).

    Article  Google Scholar 

  25. S. Gómez-Moñivas, L. S. Froufe-Pérez, A. J. Caamaño, and J. J. Sáenz, Appl. Phys. Lett. 79, 4048 (2001).

    Article  ADS  Google Scholar 

  26. S. Belaidi, F. Lebon, P. Girard, et al., Appl. Phys. A 66, S239 (1998).

    Article  Google Scholar 

  27. S. Belaidi, P. Girard, and G. Lévéque, J. Appl. Phys. 81, 1023 (1997).

    Article  ADS  Google Scholar 

  28. S. Belaidi, P. Girard, and G. Lévéque, Microelectron. Reliab. 37, 1627 (1997).

    Article  Google Scholar 

  29. D. M. Taylor, Thin Solid Films 331, 1 (1998).

    Article  ADS  MathSciNet  Google Scholar 

  30. A. Gil, J. Colchero, J. Gómez-Herrero, and A. M. Baró, Nanotechnology 14, 332 (2003).

    Article  ADS  Google Scholar 

  31. Y. Sugawara, T. Uchihashi, M. Abe, and S. Morita, Appl. Surf. Sci. 140, 371 (1999).

    Article  ADS  Google Scholar 

  32. S. Sounilhac, E. Barthel, and F. Creuzet, Appl. Surf. Sci. 140, 411 (1999).

    Article  ADS  Google Scholar 

  33. J. W. Hong, S.-I. Park, and Z. G. Khim, Rev. Sci. Instrum. 70, 1735 (1999).

    Article  ADS  Google Scholar 

  34. K. Okamoto, Y. Sugawara, and S. Morita, Appl. Surf. Sci. 188, 381 (2002).

    Article  ADS  Google Scholar 

  35. S. Gómez-Moñivas, L. S. Froufe, R. Carminati, et al., Nanotechnology 12, 496 (2001).

    Article  ADS  Google Scholar 

  36. H. Bluhm, A. Wadas, R. Wiesendanger, et al., Phys. Rev. B 55, 4 (1997).

    Article  ADS  Google Scholar 

  37. A. San Paulo and R. Garcia, Phys. Rev. B 66, 041406(R) (2002).

  38. S. Kitamura, K. Suzuki, and M. Iwatsuki, Appl. Surf. Sci. 140, 265 (1999).

    Article  ADS  Google Scholar 

  39. S. Kitamura, K. Suzuki, M. Iwatsuki, and C. B. Mooney, Appl. Surf. Sci. 157, 222 (2000).

    Article  ADS  Google Scholar 

  40. D. Sarid, Scanning Force Microscopy with Applications to Electric, Magnetic, and Atomic Forces (Oxford Univ. Press, New York, 1994).

    Google Scholar 

  41. C. Donolato, J. Appl. Phys. 78, 684 (1995).

    Article  ADS  Google Scholar 

  42. S. Hudlet, M. Saint Jean, B. Roulet, et al., J. Appl. Phys. 77, 3308 (1995).

    Article  ADS  Google Scholar 

  43. Y. J. Huang, J. Slinkman, and C. C. Williams, Ultramicroscopy 42–44, 298 (1992).

    Article  Google Scholar 

  44. Ch. Sommerhalter, Th. Glatzel, Th. W. Matthes, et al., Appl. Surf. Sci. 157, 263 (2000).

    Article  ADS  Google Scholar 

  45. P. Girard, Nanotechnology 12, 485 (2001).

    Article  ADS  Google Scholar 

  46. J. W. Hong, D. S. Kahng, J. C. Shin, et al., J. Vac. Sci. Technol. B 16, 2942 (1998).

    Article  Google Scholar 

  47. S. Gómez-Moñivas, J. J. Sáenz, R. Carminati, and J. J. Greffet, Appl. Phys. Lett. 76, 2955 (2000).

    Article  ADS  Google Scholar 

  48. F. Muller, A. D. Muller, M. Hietschold, and S. Kammer, Meas. Sci. Technol. 9, 734 (1998).

    Article  ADS  Google Scholar 

  49. S. J. T. Van Noort, K. O. Van der Werf, B. G. de Grooth, et al., Ultramicroscopy 69, 117 (1997).

    Article  Google Scholar 

  50. J. P. Spatz, S. Sheiko, M. Moller, et al., Langmuir 13, 4699 (1997).

    Article  Google Scholar 

  51. R. Hillenbrand, M. Stark, and R. Guckenberger, Appl. Phys. Lett. 76, 3478 (2000).

    Article  ADS  Google Scholar 

  52. S. J. O’Shea, R. M. Atta, and M. E. Welland, Rev. Sci. Instrum. 66, 2508 (1995).

    Article  ADS  Google Scholar 

  53. H. O. Jacobs, H. F. Knapp, and A. Stemmer, Rev. Sci. Instrum. 70, 1756 (1999).

    Article  ADS  Google Scholar 

  54. M. C. Hersam, A. C. F. Hoole, S. J. O’Shea, and M. E. Welland, Appl. Phys. Lett. 72, 915 (1998).

    Article  ADS  Google Scholar 

  55. A. Efimov and S. R. Cohen, J. Vac. Sci. Technol. A 18, 1051 (2000).

    Article  ADS  Google Scholar 

  56. T. Trenkler, T. Hantschel, R. Stephenson, et al., J. Vac. Sci. Technol. B 18, 418 (2000).

    Article  Google Scholar 

  57. A. Kikukawa, S. Hosaka, and R. Imura, Appl. Phys. Lett. 66, 3510 (1995).

    Article  ADS  Google Scholar 

  58. T. R. Albrecht, P. Grütter, D. Horne, and D. Rugar, J. Appl. Phys. 69, 668 (1991).

    Article  ADS  Google Scholar 

  59. S. Kitamura and H. Iwatsuki, Appl. Phys. Lett. 72, 3154 (1998).

    Article  ADS  Google Scholar 

  60. K. Okamoto, K. Yoshimoto, Y. Sugawara, and S. Morita, Appl. Surf. Sci. 210, 128 (2003).

    Article  ADS  Google Scholar 

  61. S. Yee, M. Stratmann, and R. A. Oriani, J. Electrochem. Soc. 138, 55 (1991).

    Article  Google Scholar 

  62. I. Baikie, U. Peterman, and B. Lagel, Surf. Sci. 433–435, 249 (1999).

    Article  Google Scholar 

  63. B. Lagel, I. Baikie, and U. Petermann, Surf. Sci. 433–435, 622 (1999).

    Article  Google Scholar 

  64. W. Telieps and E. Bauer, Ultramicroscopy 17, 57 (1985).

    Article  Google Scholar 

  65. B. Bhushan and A. V. Goldade, Appl. Surf. Sci. 157, 373 (2000).

    Article  ADS  Google Scholar 

  66. J. M. R. Weaver and D. W. Abraham, J. Vac. Sci. Technol. B 9, 1559 (1991).

    Article  Google Scholar 

  67. M. Nonnenmacher, M. P. O’Boyle, and H. K. Wickramasinghe, Appl. Phys. Lett. 58, 2921 (1991).

    Article  ADS  Google Scholar 

  68. M. P. O’Boyle, T. T. Hwang, and H. K. Wickramasinghe, Appl. Phys. Lett. 74, 2641 (1999).

    Article  ADS  Google Scholar 

  69. B. Bhushan and A. V. Goldade, Wear 244, 107 (2000).

    Article  Google Scholar 

  70. Ch. Sommerhalter, Th. W. Matthes, Th. Glatzel, et al., Appl. Phys. Lett. 75, 286 (1999).

    Article  ADS  Google Scholar 

  71. N. A. Burnham, R. J. Colton, and H. M. Pollock, Phys. Rev. Lett. 69, 144 (1992).

    Article  ADS  Google Scholar 

  72. H. O. Jacobs, P. Leuchtmann, O. J. Homan, and A. Stemmer, J. Appl. Phys. 84, 1168 (1998).

    Article  ADS  Google Scholar 

  73. S. Sadewasser, Th. Glatzel, R. Shikler, et al., Appl. Surf. Sci. 210, 32 (2003).

    Article  ADS  Google Scholar 

  74. O. Vatel and M. Tanimoto, J. Appl. Phys. 77, 2358 (1995).

    Article  ADS  Google Scholar 

  75. Y. Leng, C. C. Williams, L. C. Su, and G. B. Stringfellow, Appl. Phys. Lett. 66, 1264 (1995).

    Article  ADS  Google Scholar 

  76. A. K. Henning and T. Hochwitz, Mater. Sci. Eng. B 42, 88 (1996).

    Article  Google Scholar 

  77. Th. Glatzel, S. Sadewasser, and M. Ch. Lux-Steiner, Appl. Surf. Sci. 210, 84 (2003).

    Article  ADS  Google Scholar 

  78. T. Takahashi and T. Kawamukai, Ultramicroscopy 82, 63 (2000).

    Article  Google Scholar 

  79. R. Shikler and Y. Rosenwaks, Appl. Surf. Sci. 157, 256 (2000).

    Article  ADS  Google Scholar 

  80. S. Akita, S. Takahashi, and Y. Nakayama, in Abstracts of 11th International Conference of Scanning Tunneling Microscopy, Spectroscopy, and Related Techniques (Vancouver, Canada, 2001), p. 251.

  81. S. Ono, M. Takeuchi, and T. Takahashi, Appl. Phys. Lett. 78, 1086 (2001).

    Article  ADS  Google Scholar 

  82. M. Nonnenmacher, M. O. O’Boyle, and H. K. Wickramasinghe, Ultramicroscopy 42–44, 268 (1992).

    Article  Google Scholar 

  83. S. Lévéque, P. Girard, E. Skouri, and D. Yarekha, Appl. Surf. Sci. 157, 251 (2000).

    Article  ADS  Google Scholar 

  84. A. Sasahara, H. Uetsuka, and H. Onishi, Surf. Sci. 529, L245 (2003).

    Article  ADS  Google Scholar 

  85. P. Campestrini, E. P. M. van Westing, H. W. van Rooijen, and J. H. W. de Wit, Corros. Sci. 42, 1853 (2000).

    Article  Google Scholar 

  86. M. Tanimoto and O. Vatel, J. Vac. Sci. Technol. B 14, 1547 (1996).

    Article  Google Scholar 

  87. F. Robin, H. Jakobs, O. Homan, et al., Appl. Phys. Lett. 76, 2907 (2000).

    Article  ADS  Google Scholar 

  88. A. Breymesser, V. Schlosser, D. Pieró, et al., Sol. Energy Mater. Sol. Cells 66, 171 (2001).

    Article  Google Scholar 

  89. R. Shikler, T. Meoded, N. Fried, and Y. Rosenwaks, Appl. Phys. Lett. 74, 2972 (1999).

    Article  ADS  Google Scholar 

  90. G. Koley and M. G. Spencer, Appl. Phys. Lett. 78, 2873 (2001).

    Article  ADS  Google Scholar 

  91. M. Vogel, B. Stein, H. Pettersson, and K. Karrai, Appl. Phys. Lett. 78, 2592 (2001).

    Article  ADS  Google Scholar 

  92. B. D. Terris, J. E. Stern, D. Rugar, and H. J. Mamin, J. Vac. Sci. Technol. A 8, 374 (1990).

    Article  ADS  Google Scholar 

  93. T. Ishihashi, M. Ohta, Y. Sugawara, et al., J. Vac. Sci. Technol. B 15, 1543 (1997).

    Article  Google Scholar 

  94. Q. Xu and J. W. P. Hsu, J. Appl. Phys. 85, 2465 (1999).

    Article  ADS  Google Scholar 

  95. K. M. Jones, P. Visconti, F. Yun, et al., Appl. Phys. Lett. 78, 2497 (2001).

    Article  ADS  Google Scholar 

  96. M. Yasutake, D. Aoki, and M. Fujihira, Thin Solid Films 273, 279 (1996).

    Article  ADS  Google Scholar 

  97. J. W. Hong, G. H. Noh, S. I. Park, et al., Phys. Rev. B 58, 5078 (1998).

    Article  ADS  Google Scholar 

  98. M. Saint Jean, S. Hudlet, C. Güthmann, and J. Berger, Phys. Rev. B 56, 15391 (1997).

    Article  ADS  Google Scholar 

  99. C. Schönenberger and S. F. Alvarado, Phys. Rev. Lett. 65, 3162 (1990).

    Article  ADS  Google Scholar 

  100. L. M. Eng, M. Abplanalp, and P. Günter, Appl. Phys. A 66, S679 (1998).

    Article  ADS  Google Scholar 

  101. L. M. Eng, J.-H. Güntherodt, G. Rosenman, et al., J. Appl. Phys. 83, 5973 (1998).

    Article  ADS  Google Scholar 

  102. F. Saurenbach and B. D. Terris, Appl. Phys. Lett. 56, 1703 (1990).

    Article  ADS  Google Scholar 

  103. K. Franke, Ferroelectr. Lett. Sect. 19, 25 (1995).

    Article  Google Scholar 

  104. M. Labardi, V. Likodimos, and M. Allegrini, Phys. Rev. B 61, 14390 (2000).

    Article  ADS  Google Scholar 

  105. C. Durkan, D. P. Chu, P. Migliorato, and M. E. Welland, Appl. Phys. Lett. 76, 366 (2000).

    Article  ADS  Google Scholar 

  106. H. Q. Ni, Y. F. Lu, Z. Y. Liu, et al., Appl. Phys. Lett. 79, 812 (2001).

    Article  ADS  Google Scholar 

  107. H. Bluhm, A. Wadas, R. Wiesendanger, et al., Appl. Phys. Lett. 71, 146 (1997).

    Article  ADS  Google Scholar 

  108. G. H. Buh, H. J. Chung, and Y. Kuk, Appl. Phys. Lett. 79, 2010 (2001).

    Article  ADS  Google Scholar 

  109. J. F. Bresse and S. Blayac, Solid-State Electron. 45, 1071 (2001).

    Article  ADS  Google Scholar 

  110. P. Girard, A. N. Titkov, M. Ramonda, et al., Appl. Surf. Sci. 200, 1 (2002).

    Article  ADS  Google Scholar 

  111. A. Ankudinov, V. Marushchak, A. Titkov, et al., Phys. Low-Dimens. Semicond. Struct. 3–4, 9 (2001).

    Google Scholar 

  112. J. Lu, E. Delamarche, R. Bennewitz, et al., in Proceedings of 10th International Conference on STM/PPM (Seoul, 1999), p. 525.

  113. O. A. Semenikhin, L. Jiang, T. Iyoda, et al., Phys. Chem. 100, 18603 (1996).

    Article  Google Scholar 

  114. O. A. Semenikhin, L. Jiang, T. Iyoda, et al., Electrochim. Acta 42, 3321 (1997).

    Article  Google Scholar 

  115. R. Blum, A. Ivankov, S. Schwantes, and M. Eich, Appl. Phys. Lett. 76, 604 (2000).

    Article  ADS  Google Scholar 

  116. K. Yagi and M. Fujihira, Appl. Surf. Sci. 157, 405 (2000).

    Article  ADS  Google Scholar 

  117. M. Fujihira and H. Kawate, J. Vac. Sci. Technol. B 12, 1604 (1994).

    Article  Google Scholar 

  118. A. J. Keslarek, K. A. R. Costa, and F. Galembeck, Langmuir 17, 7886 (2001).

    Article  Google Scholar 

  119. A. Gil, P. J. de Pablo, J. Colchero, et al., Nanotechnology 13, 309 (2002).

    Article  ADS  Google Scholar 

  120. F. Moreno-Herrero, P. Herrero, F. Moreno, et al., Nanotechnology 14, 128 (2003).

    Article  ADS  Google Scholar 

  121. K. J. Kwak, S. Yoda, and M. Fujihira, Appl. Surf. Sci. 210, 73 (2003).

    Article  ADS  Google Scholar 

  122. C. Di Natale, C. Goletti, R. Paolesse, et al., Sens. Actuators B 57, 183 (1999).

    Article  Google Scholar 

  123. E. Moons, A. Goossens, and T. Savenije, J. Phys. Chem. B 101, 8492 (1997).

    Article  Google Scholar 

  124. S. Yamashina and M. Shigeno, J. Electron Microsc. 44, 462 (1995).

    Google Scholar 

  125. C. C. Williams, W. P. Hough, and S. A. Rishton, Appl. Phys. Lett. 55, 203 (1989).

    Article  ADS  Google Scholar 

  126. Š. Lányi, J. Török, and P. Řehůřek, J. Vac. Sci. Technol. 14, 892 (1996).

    Article  Google Scholar 

  127. G. Neubauer, S. R. Cohen, G. M. McClelland, et al., Rev. Sci. Instrum. 61, 1884 (1990).

    Article  Google Scholar 

  128. T. Goddenhenrich, H. Lemke, U. Hartmann, and C. Heiden, J. Vac. Sci. Technol. A 8, 383 (1990).

    Article  ADS  Google Scholar 

  129. R. C. Barret and C. F. Quate, J. Appl. Phys. 70, 2725 (1991).

    Article  ADS  Google Scholar 

  130. R. C. Barret and C. F. Quate, Ultramicroscopy 42–44, 262 (1992).

    Article  Google Scholar 

  131. N. Nakagiri, T. Yamamoto, H. Sugimura, and Y. Suzuki, J. Vac. Sci. Technol. B 14, 887 (1996).

    Article  Google Scholar 

  132. P. Stopford, T. Lodhi, R. Elgaid, et al., in Abstracts of 11th International Conference of Scanning Tunneling Microscopy, Spectroscopy, and Related Techniques (Vancouver, Canada, 2001), p. 354.

  133. Y. Naitou and N. Ookubo, Appl. Phys. Lett. 78, 2955 (2001).

    Article  ADS  Google Scholar 

  134. C. K. Kim, I. T. Yoon, Y. Kuk, and H. Lim, Appl. Phys. Lett. 78, 613 (2001).

    Article  ADS  Google Scholar 

  135. X. Yu, F. D. Callaghan, P. J. Moriarti, et al., in Abstracts of 11th International Conference of Scanning Tunneling Microscopy, Spectroscopy, and Related Techniques (Vancouver, Canada, 2001), p. 40.

  136. A. Garcia-Valenzuela, N. C. Bruce, and D. Kouznetsov, Appl. Phys. Lett. 77, 2066 (2000).

    Article  ADS  Google Scholar 

  137. A. Born and R. Wiesendanger, Appl. Phys. A 66, 421 (1998).

    Article  ADS  Google Scholar 

  138. Y. Huang and C. C. Williams, J. Vac. Sci. Technol. B 12, 369 (1994).

    Article  Google Scholar 

  139. Y. Huang, C. C. Williams, and J. Slinkman, Appl. Phys. Lett. 66, 344 (1995).

    Article  ADS  Google Scholar 

  140. C. Donolato, Mater. Sci. Eng. B 42, 99 (1996).

    Article  Google Scholar 

  141. J. F. Marchiando, J. J. Kopanski, and J. R. Lowney, J. Vac. Sci. Technol. B 16, 463 (1998).

    Article  Google Scholar 

  142. C. C. Williams, Annu. Rev. Mater. Sci. 29, 471 (1999).

    Article  ADS  Google Scholar 

  143. J. J. Kopanski, J. F. Marchiando, D. W. Benning, et al., J. Vac. Sci. Technol. B 16, 339 (1998).

    Article  Google Scholar 

  144. J. S. McMurray, J. Kim, C. C. Williams, and J. Slinkman, J. Vac. Sci. Technol. B 16, 344 (1998).

    Article  Google Scholar 

  145. J. Kim, J. S. McMurray, C. C. Williams, and J. Slinkman, J. Appl. Phys. 84, 1305 (1998).

    Article  ADS  Google Scholar 

  146. Y. Huang, C. C. Williams, and M. A. Wendman, J. Vac. Sci. Technol. A 14, 1168 (1996).

    Article  ADS  Google Scholar 

  147. F. Giannazzo, F. Priolo, V. Raineri, and V. Privitera, Appl. Phys. Lett. 76, 2565 (2000).

    Article  ADS  Google Scholar 

  148. F. Giannazzo, V. Raineri, V. Privitera, and F. Priolo, Mater. Sci. Semicond. Process. 4, 77 (2001).

    Article  Google Scholar 

  149. L. Ciampolini, F. Gainnazzo, M. Ciappa, et al., Mater. Sci. Semicond. Process. 4, 85 (2001).

    Article  Google Scholar 

  150. A. Shik and H. E. Ruda, Surf. Sci. 532–535, 1132 (2003).

    Article  Google Scholar 

  151. H. Tomiye and T. Yao, Appl. Surf. Sci. 159–160, 210 (2000).

    Article  Google Scholar 

  152. R. Stephenson, A. Verhulst, P. de Wolf, et al., J. Vac. Sci. Technol. B 18, 405 (2000).

    Article  Google Scholar 

  153. T. Winzell, S. Anand, I. Maximov, et al., Nucl. Instrum. Methods Phys. Res. B 173, 447 (2001).

    Article  ADS  Google Scholar 

  154. J. F. Marchiando, J. J. Kopanski, and J. Albers, J. Vac. Sci. Technol. B 18, 414 (2000).

    Article  Google Scholar 

  155. O. Bowallius, A. Anand, N. Nordell, et al., Mater. Sci. Semicond. Process. 4, 209 (2001).

    Article  Google Scholar 

  156. F. Giannazzo, L. Calcagno, F. Roccaforte, et al., Appl. Surf. Sci. 184, 183 (2001).

    Article  ADS  Google Scholar 

  157. H. Edwards, R. McGlothlin, R. San Martin, et al., Appl. Phys. Lett. 72, 698 (1998).

    Article  ADS  Google Scholar 

  158. M. L. O’Malley, G. L. Timp, S. V. Moccio, et al., Appl. Phys. Lett. 74, 272 (1999).

    Article  ADS  Google Scholar 

  159. J. J. Kopanski, J. F. Marchiando, and B. G. Rennex, J. Vac. Sci. Technol. B 18, 409 (2000).

    Article  Google Scholar 

  160. R. N. Kleiman, M. L. O’Malley, F. N. Baumann, et al., J. Vac. Sci. Technol. B 18, 2034 (2000).

    Article  Google Scholar 

  161. G. H. Buh, H. J. Chung, C. K. Kim, et al., Appl. Phys. Lett. 77, 106 (2000).

    Article  ADS  Google Scholar 

  162. D. M. Schaadt, E. J. Miller, E. T. Yu, and J. M. Redwing, Appl. Phys. Lett. 78, 88 (2001).

    Article  ADS  Google Scholar 

  163. K. V. Smith, X. Z. Dang, E. T. Yu, and J. M. Redwing, J. Vac. Sci. Technol. B 18, 2304 (2000).

    Article  Google Scholar 

  164. T. Yamamoto, Y. Suzuki, H. Sugimura, and N. Nakagiri, Jpn. J. Appl. Phys. 35, 3793 (1996).

    Article  ADS  Google Scholar 

  165. C. J. Kang, G. H. Buh, S. Lee, et al., Appl. Phys. Lett. 74, 1815 (1999).

    Article  ADS  Google Scholar 

  166. M. Hammar, E. Rodriguez Messmer, M. Luzuy, et al., Appl. Phys. Lett. 72, 815 (1998).

    Article  ADS  Google Scholar 

  167. J.-K. Leong, J. McMurray, C. C. Williams, and G. B. Stringfellow, J. Vac. Sci. Technol. B 14, 3113 (1996).

    Article  Google Scholar 

  168. J.-K. Leong, C. C. Williams, J. M. Olson, and S. Froyen, Appl. Phys. Lett. 69, 4081 (1996).

    Article  ADS  Google Scholar 

  169. P. J. Hansen, Y. E. Strausser, A. N. Erickson, et al., Appl. Phys. Lett. 72, 2247 (1998).

    Article  ADS  Google Scholar 

  170. H. Yamamoto, T. Takahashi, and I. Kamiya, Appl. Phys. Lett. 77, 1994 (2000).

    Article  ADS  Google Scholar 

  171. O. Bowallius and S. Anand, Mater. Sci. Semicond. Process. 4, 81 (2001).

    Article  Google Scholar 

  172. T. Hochwitz, A. K. Henning, Ch. Levey, et al., J. Vac. Sci. Technol. B 14, 440 (1996).

    Article  Google Scholar 

  173. K. Kimura, K. Kobayashi, H. Yamada, and K. Matsushige, Appl. Surf. Sci. 210, 93 (2003).

    Article  ADS  Google Scholar 

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Translated from Kristallografiya, Vol. 49, No. 3, 2004, pp. 541–565.

Original Russian Text Copyright © 2004 by Sorokina, Tolstikhina.

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Sorokina, K.L., Tolstikhina, A.L. Atomic force microscopy modified for studying electric properties of thin films and crystals. Review. Crystallogr. Rep. 49, 476–499 (2004). https://doi.org/10.1134/1.1756648

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