A simple and efficient dynamic modeling method for compliant micropositioning mechanisms using flexure hinges

Daniel C. Handley; Tien-Fu Lu; Yuen Kuan Yong; Chris W. J. Zhang

doi:10.1117/12.523573

2 April 2004 A simple and efficient dynamic modeling method for compliant micropositioning mechanisms using flexure hinges

Daniel C. Handley, Tien-Fu Lu, Yuen Kuan Yong, Chris W. J. Zhang

Author Affiliations +

Proceedings Volume 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III; (2004) https://doi.org/10.1117/12.523573
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

In this paper we consider the dynamic modelling of compliant micropositioning mechanisms using flexure hinges. A simple modelling method is presented that is particularly useful for modelling parallel micropositioning mechanisms. This method is based upon linearisation of the geometric constraint equations of the compliant mechanism. This results in a linear kinematic model, a constant Jacobian and linear dynamic model. To demonstrate the computational simplicity of this methodology it is applied to a four-bar linkage using flexure hinges. Comparisons are made between the simple dynamic model and a complete non-linear model derived using the Lagrangian method. The investigation reveals that this new model is accurate yet computationally efficient and simple to use. The method is then further applied to a parallel 3-degree of freedom (dof) mechanism. It is shown that the method can be simply applied to this more complex parallel mechanism. A dynamic model of this mechanism is desired for use in optimal design and for controller design.

Citation Download Citation

Daniel C. Handley, Tien-Fu Lu, Yuen Kuan Yong, and Chris W. J. Zhang "A simple and efficient dynamic modeling method for compliant micropositioning mechanisms using flexure hinges", Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, (2 April 2004); https://doi.org/10.1117/12.523573

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